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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한기계학회 Journal of Mechanical Science and Technology Journal of Mechanical Science and Technology Vol.19 No.2
- 발행연도
- 2005.2
- 수록면
- 682 - 691 (10page)
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초록· 키워드
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This paper describes the design, fabrication, and testing of a microturbine developed at seoul National University Here, the term "microturbine" refers to a radial turbine with a diameter on the order of a centimeter such devices can be used to transmit power for various systems The turbine is designed using a commercial CFD code, and it has a design flow coefficient of 0.238 and work coefficient of 0 542 It has 31 stator blades and 24 rotor blades A hydrodynamic Journal bearing and hydrostatic thrust bearings counteract radial and axial forces on the rotor The test turbine consists of a stack of five wafers and is fabricated by MEMS technology, using photolithography, DRIE, and bonding processes The first, second, fourth, and fifth layers contain plumbing, and hydrostatic axial thrust bearings for the turbine The third wafer contains the turbine's stator, rotor, and hydrodynamic Journal bearings Furthermore, a turbine test facility containing a flow control system and instrumentation has been designed and constructed In performance tests, a maximum rotation speed of 11,400 rpm and flow rate of 16,000 seem have been achieved.
목차
Abstract
1. Introduction
2. Aerodynamic Design
3. Fabrication Process
4. Turbine Test Facility
5. Performance Test Results
6. Conclusions
Acknowledgments
References
참고문헌 (15)
참고문헌 신청
Aichlmayr, H T, Kittelson, D B and Zachariah, M R, 2002, "Micro-Homogeneous Charge Compression Ignition (HCCI) Combustion Investigations Employing Detailed Chemical Kinetic Modeling and Experiments," the Western States Section of the Combustion Institute,
Ayon, A A, Braff, R, Lin, C C, Sawin, H H and Schmidt, M A, 1999, "Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher," Journal of the Electrochemical Society, Vol 146, No 1, pp 339~346
Barber, R W and Emerson, D R, 2002, "The Influence of Knudsen Number on the Hydrodynamic Development Length within Parallel Plate Micro-Channels," WIT Press, Southampton, UK, Advances in fluid Mechanics IV, pp 207~216
Ehrich, F F and Jacobson, S A, 2001, "Development of High-Speed Gas Bearings for High-Power-Density Micro-Devices," ASME Turbo Expo 2001, 2001-GI-0478
Fernandez-Pello, C, Liepmann, D and Pisano A, 2003, MEMS Rotary Combustion Laboratory, University of California at Berkeley http //www me berkeley edu/mrcl
Ayon, A A, Braff, R, Lin, C C, Sawin, H H and Schmidt, M A, 1999, "Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher," Journal of the Electrochemical Society, Vol 146, No 1, pp 339~346
Barber, R W and Emerson, D R, 2002, "The Influence of Knudsen Number on the Hydrodynamic Development Length within Parallel Plate Micro-Channels," WIT Press, Southampton, UK, Advances in fluid Mechanics IV, pp 207~216
Ehrich, F F and Jacobson, S A, 2001, "Development of High-Speed Gas Bearings for High-Power-Density Micro-Devices," ASME Turbo Expo 2001, 2001-GI-0478
Fernandez-Pello, C, Liepmann, D and Pisano A, 2003, MEMS Rotary Combustion Laboratory, University of California at Berkeley http //www me berkeley edu/mrcl
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UCI(KEPA) : I410-ECN-0101-2009-550-014473110