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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2004.10
- 수록면
- 379 - 382 (4page)
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초록· 키워드
오류제보하기
In the semiconductor manufacturing technology as the plasma etching processing, Voltage fed-D class in-series resonant high frequency power amplifier using power MOSFET, which operates under a condition of discontinuous resonant current based soft switching, for plasma generating is introduced. This paper presents some practical and theoretical evaluation of voltage source class D phase-shifted ZVS-PWM DC-DC power converter with a high frequency
transformer link and capacitor input type DC smoothing filter,
which is designed for 50 KHz, by using IGBT power modulation. Its operating principle in a steady-state is described by using equivalent circuits, along with the experimental operation waveforms. The soft switching operating range for phase-shifted duty factor is illustrated and discussed by using a criteria value due to residual voltage across the lossless snubbing capacitors. The output power regulation vs phase shifted duty factor characteristics of this power converter are evaluated under a condition of ZVS commutation.
Index Terms
Voltage source-fed DC-DC power converter, Lossless capacitive snubbers, Phase shifted PWM, Zero voltage soft switching, High frequency transformer link, Capacitive input DC smoothing filter, Circuit soft switching operation limitation, Plasma processing applications
transformer link and capacitor input type DC smoothing filter,
which is designed for 50 KHz, by using IGBT power modulation. Its operating principle in a steady-state is described by using equivalent circuits, along with the experimental operation waveforms. The soft switching operating range for phase-shifted duty factor is illustrated and discussed by using a criteria value due to residual voltage across the lossless snubbing capacitors. The output power regulation vs phase shifted duty factor characteristics of this power converter are evaluated under a condition of ZVS commutation.
Index Terms
Voltage source-fed DC-DC power converter, Lossless capacitive snubbers, Phase shifted PWM, Zero voltage soft switching, High frequency transformer link, Capacitive input DC smoothing filter, Circuit soft switching operation limitation, Plasma processing applications
목차
Abstract
1. Introduction
2. Proposed Soft-Switching DC-DC Converter
3. Experimental results
4. Conclusion
References
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