UV-enhanced Atomic Layer Deposition of Al2O3 Thin Film

윤관혁 ,  성명모

한국진공학회 학술발표회초록집

2011 .08

Deposition and characterization of inorganic thin films by using UV-enhanced Atomic Layer Deposition

정진원 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

자외선 활성화 원자층 성장 기술을 이용한 상온에서 TiO₂ 박막의 제조

이병훈 ,  성명모

Applied Science and Convergence Technology

2010 .03

Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

송종수 ,  윤홍로 ,  성명모

한국진공학회 학술발표회초록집

2016 .02

Degradation of gas-phase toluene by TiO₂ loaded on carbon fibers using Atomic Layer Deposition (ALD) under UV irradiation

Yuan Luo ,  Myoung Joo Kim ,  Hyun Ook Seo 외 3명

한국진공학회 학술발표회초록집

2010 .02

Effect of deposition temperature and thickness on surface properties of ALD TiO₂ films

장영문 ,  양병찬 ,  신정우 외 2명

한국진공학회 학술발표회초록집

2017 .02

Influence of TiO₂ Thin Film Thickness and Humidity on Toluene Adsorption and Desorption Behavior of Nanoporous TiO₂/SiO₂ Prepared by Atomic Layer Deposition (ALD)

Chae Won Sim ,  Hyun Ook Seo ,  Kwang-Dae Kim 외 4명

한국진공학회 학술발표회초록집

2012 .02

Room Temperature Deposition of ZrO₂ thin film by using UV - enhanced Atomic Layer Deposition

강문철 ,  성명모

한국진공학회 학술발표회초록집

2005 .02

Photocatalytic activities and surface properties of e-beam treated carbon paper deposited TiO₂ using Atomic Layer Deposition (ALD)

Myoung Joo Kim ,  Hyun Ook Seo ,  Yuan Luo 외 2명

한국진공학회 학술발표회초록집

2010 .02

Study of CO Oxidation on Bare and TiO₂-coated NiO/Ni(OH)₂

Jong Won Nam ,  Kwang-Dae Kim ,  Dong Wun Kim 외 3명

한국진공학회 학술발표회초록집

2011 .08

CO oxidation catalyzed by NiO/mesoporous Al₂O₃

Sang Wook Han ,  Dae Han Kim ,  Eun Ji Pa 외 6명

한국진공학회 학술발표회초록집

2015 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Conducting ZnO Thin Film Fabrication by UV-enhanced Atomic Layer Deposition

김세준 ,  김홍범 ,  성명모

한국진공학회 학술발표회초록집

2013 .08

Fabrication of dense Al2O3 thin films using UV-enhanced ALD at room temperature

윤관혁 ,  성명모

한국진공학회 학술발표회초록집

2014 .08

Application of Atomic Layer Deposition to Solid Oxide Fuel Cells

Eui-Hyun Kim ,  Myeong-Hee Ko ,  Hee-Soo Hwang 외 1명

한국진공학회 학술발표회초록집

2014 .02

Application of Atomic Layer Deposition to Solid Oxide Fuel Cells Based on Nanoscale Electrode Modification

Jiwon Oh ,  Heesu Hwang ,  Seungmuk Bae 외 1명

한국진공학회 학술발표회초록집

2018 .08

Tungsten Nitride Thin Film Deposition for Copper Diffusion Barrier by Using Atomic Layer Deposition

황영현 ,  조원주 ,  김영환 외 1명

한국진공학회 학술발표회초록집

2011 .08

Novel organic-inorganic thin films with monolayer precision using molecular layer deposition (MLD) and atomic layer deposition (ALD)

윤관혁 ,  김인정 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

TiO2 Nanotubes Fabricated by Atomic Layer Deposition for Solar Cells

Mi-Hee Jung ,  Man Gu Kang

한국진공학회 학술발표회초록집

2011 .08