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In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be 109.6 ± 10 ㎬ and 1.73 ± 0.3 ㎬, respectively, from the nanoindentation test, while elastic modulus was 241 ± 7 ㎬ from the nanobeam bending test.
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Abstract
1. 서론
2. 나노스케일의 금 박막 나노빔 시험편 제작 공정
3. 기계적 물성 측정 결과
4. 결론
감사의 글
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UCI(KEPA) : I410-ECN-0101-2009-560-019042642