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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2011.4
- 수록면
- 79 - 87 (9page)
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초록· 키워드
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In this paper, the best conditions for the deposition of the high quality diamond thin-film from N-hexane as a carbon source in the microwave plasma process was carried out. Major parameters are the deposition time, flow rates of oxygen and hexane. The deposition time for the steady state thin-film was required more than 4[h], and the suitable flow rates of hexane and oxygen for the high-quality thin-film are 0.4[sccm] and 0.1～0.2[sccm], respectively. In addition, amorphous carbons such as DLC and graphite were grown by increasing the flow rate of hexane, and it decreased by increasing the flow rate of oxygen. Specifically, the growth rate is about 1.5[㎛h-1] under no addition of oxygen and it decreased about 60[%] as ca. 1.0[㎛h-1] with oxygen.
목차
Abstract
1. 서론
2. 실험 방법
3. 실험 및 분석
4. 결론
감사의 글
References
저자소개
참고문헌 (10)
참고문헌 신청
1. [학술지(정기간행물)] - B. V. Spitsyn / 1981 / Vapor growth of diamond on diamond and other surface / J. Crystal Growth 52 : 219 ~ 226
2. [학술지(정기간행물)] - S. Matsumoto / 1982 / Vapor Deposition of diamond Particle from Methane / Jpn. J. Appl. Phys 21 (4) : L183 ~ L185
3. [학술지(정기간행물)] - Xiao Jun Hu / 2009 / The structure properties of B-O codoped diamond films 18 (2) : 210 ~ 212
4. [학술지(정기간행물)] - Jin-hai Gao / 2008 / Fabrication of globe-like diamond microcrystalline aggregate films and investigation of their field emission properties / Thin Solid Films 516 (21) : 7807 ~ 7811
5. [학술지(정기간행물)] - Yasuo Koide / 2008 / Metal-diamond semiconductor interface and photodiode application / Applied Surface Sci 254 (19) : 6268 ~ 6272
2. [학술지(정기간행물)] - S. Matsumoto / 1982 / Vapor Deposition of diamond Particle from Methane / Jpn. J. Appl. Phys 21 (4) : L183 ~ L185
3. [학술지(정기간행물)] - Xiao Jun Hu / 2009 / The structure properties of B-O codoped diamond films 18 (2) : 210 ~ 212
4. [학술지(정기간행물)] - Jin-hai Gao / 2008 / Fabrication of globe-like diamond microcrystalline aggregate films and investigation of their field emission properties / Thin Solid Films 516 (21) : 7807 ~ 7811
5. [학술지(정기간행물)] - Yasuo Koide / 2008 / Metal-diamond semiconductor interface and photodiode application / Applied Surface Sci 254 (19) : 6268 ~ 6272
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UCI(KEPA) : I410-ECN-0101-2012-565-004481413