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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.6 No.5
- 발행연도
- 2011.9
- 수록면
- 688 - 692 (5page)
이용수
초록· 키워드
오류제보하기
Carbon nanotubes (CNTs) are vertically grown inside high-aspect-ratio vertical pores of anodized aluminum oxide. A CNT catalyst layer is introduced by atomic layer deposition to the bottom of the pores, after which the CNTs are successfully grown from the layer using chemical vapor deposition. The CNTs formed a complete vertical conductive path. The conductivity of the CNT-vertical path is also measured and discussed. The present atomic layer deposition-incorporated catalyst deposition is predicted to enable the integration of CNTs with various challenging configurations, including high-aspect-ratio vertical channels or vertical interconnects.
목차
Abstract
1. Introduction
2. Experimental Details and Results
3. Ⅳ Measurements and Discussion
4. Conclusion
Acknowledgment
References
참고문헌 (8)
참고문헌 신청
G. S. Duesberg / 2004 / Way towards the scalable integration of carbon nanotubes into silicon based technolgy / Diamond and related materials 13:354~361
J-H Yen / 2004 / Density control for carbon nanotube arrays synthesized by ICP-CVD using AAO/Si as a Nanotemplate / Electrochemical and solid state letters 7:H29~H31
G. P. Sklar / 2005 / Pulsed electrodeposition into AAO templates for CVD growth of carbon nanotubes arrays / Nanotechnology 16:1265~1271
A. P. Graham / 2004 / Towards the integration of carbon nanotubes in microelectronics / Diamond and related materials 13:1296~1300
M. Nihei / 2004 / Simultaneous formation of multiwall carbon nanotubes and their end-bonded ohmic contacts to Ti electrodes for future ULSI interconnects / Japanese Journal of Applied Physics 43(4B):1856~1859
J-H Yen / 2004 / Density control for carbon nanotube arrays synthesized by ICP-CVD using AAO/Si as a Nanotemplate / Electrochemical and solid state letters 7:H29~H31
G. P. Sklar / 2005 / Pulsed electrodeposition into AAO templates for CVD growth of carbon nanotubes arrays / Nanotechnology 16:1265~1271
A. P. Graham / 2004 / Towards the integration of carbon nanotubes in microelectronics / Diamond and related materials 13:1296~1300
M. Nihei / 2004 / Simultaneous formation of multiwall carbon nanotubes and their end-bonded ohmic contacts to Ti electrodes for future ULSI interconnects / Japanese Journal of Applied Physics 43(4B):1856~1859
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