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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2012.11
- 수록면
- 255 - 258 (4page)
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초록· 키워드
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This paper proposes a target voltage independent capacitance measurement circuit aiming for PWM-MEMS control. PWM-MEMS, which is controlled by time domain PWM signal, instead of voltage domain analog signal, is emerging for fast-response MEMS control. Real-time angle measurement for feedback control is essential for the PWM-MEMS. Capacitance measurement is one of promising technique for the angle measurement without any additional optical components. To realize real-time capacitance measurement for PWM-MEMS with minimal disturbance to MEMS operation, measurement at driving electrode is expected, and short measurement time within off state of PWM signal, small amount of charges for measurement are required. We have designed and fabricated the proposed capacitance measurement circuits in 0.18㎛ CMOS, and measurement result shows that measurement time of 60㎲, charge requirement of 80fC with capacitance measurement at target voltage range of 2.5V - 1.5V.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. PRINCIPLE OF OPERATION
Ⅲ. TOPOLOGY OF COMPONENT BLOCKS
Ⅳ. MEASUREMENT RESULT
Ⅴ. CONCLUSION
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UCI(KEPA) : I410-ECN-0101-2014-569-000729647