지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.13 No.1
- 발행연도
- 2013.2
- 수록면
- 15 - 21 (7page)
이용수
초록· 키워드
오류제보하기
In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallelplate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional twoparallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.
목차
Abstract
I. INTRODUCTION
II. DESIGN
III. FABRICATION
IV. MEASUREMENT RESULTS
V. CONCLUSIONS
REFERENCES
참고문헌 (18)
참고문헌 신청
2. [학술지(정기간행물)] - Seonho Seok / 2001 / A High Performance Solenoid-Type MEMS Inductor / Journal of Semiconductor Technology and Science 1 (3) : 1 ~ 7
3. [학술지(정기간행물)] - A. Q. Liu / 2007 / RF MEMS Switches and Integrated Wsitching Circuits / Journal of Semiconductor Technology and Science 7 (3) : 166 ~ 176
4. [학술지(정기간행물)] - Harrie A C Tilmans / 2003 / MEMS for Wireless Communications: ‘from RF-MEMScomponents to RF-MEMS SiP’ / Journal of Micronechanics and Microengineering 13 (4) : 139 ~ 163
5. [학술지(정기간행물)] - Jong-Man Kim / 2004 / A Micromachined Two-state Bandpass Filter using Series Inductors and MEMS Switches for WLAN Applications / Journal of Micronechanics and Microengineering 4 (4) : 300 ~ 306
6. [학술지(정기간행물)] - Aleksander Dec / 2000 / Microwave MEMS-Based Voltage-Controlled Oscillators / IEEE Transactions on Microwave Theory and Techniques 48 (11) : 1943 ~ 1949
3. [학술지(정기간행물)] - A. Q. Liu / 2007 / RF MEMS Switches and Integrated Wsitching Circuits / Journal of Semiconductor Technology and Science 7 (3) : 166 ~ 176
4. [학술지(정기간행물)] - Harrie A C Tilmans / 2003 / MEMS for Wireless Communications: ‘from RF-MEMScomponents to RF-MEMS SiP’ / Journal of Micronechanics and Microengineering 13 (4) : 139 ~ 163
5. [학술지(정기간행물)] - Jong-Man Kim / 2004 / A Micromachined Two-state Bandpass Filter using Series Inductors and MEMS Switches for WLAN Applications / Journal of Micronechanics and Microengineering 4 (4) : 300 ~ 306
6. [학술지(정기간행물)] - Aleksander Dec / 2000 / Microwave MEMS-Based Voltage-Controlled Oscillators / IEEE Transactions on Microwave Theory and Techniques 48 (11) : 1943 ~ 1949
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2014-569-000245231