지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2012.10
- 수록면
- 656 - 660 (5page)
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초록· 키워드
오류제보하기
Positioning stages are widely used for a variety of machinery. They are usually mounted on a heavy base, which is supported by soft springs for vibration isolation. Then motion of a positioning stage induces vibration into the whole system, including the positioning stage and the base structure, due to the inertial-reactive force effect, as well as the vertical moving-load effect. This paper investigates the vibration behavior and a vibration suppression method for a positioning-system base caused by the stage motion. A vibration suppression method is applied to reduce the residual vibrations in the base structure by modifying the velocity command for positioning stage using command shaping. Simulations are performed to find a command shaper appropriate for this problem. Experiments show that the proposed command shaping technique effectively removes the residual vibrations from the positioning-stage base and that command shaping can enhance the positioning accuracy of stage.
목차
Abstract
1. INTRODUCTION
2. SYSTEM MODELING
3. COMMAND SHAPER DESIGN
4. EXPERIMENTS
5. CONCLUSIONS
REFERENCES
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