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Piezoelectric characteristics of AlN beam array for artificial basilar membrane
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인공기저막을 위한 AlN 빔 어레이 음향센서의 압전 특성 평가

논문 기본 정보

Type
Proceeding
Author
Jongmoon Jang (대구경북과학기술원(DGIST)) Sangwon Kim (대구경북과학기술원(DGIST)) Hongsoo Choi (대구경북과학기술원(DGIST))
Journal
The Korean Society of Mechanical Engineers 대한기계학회 춘추학술대회 대한기계학회 2013년도 마이크로/나노공학부문 춘계학술대회 논문집
Published
2013.5
Pages
40 - 40 (1page)

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Piezoelectric characteristics of AlN beam array for artificial basilar membrane
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#Piezolectric #acoustic sensor #AlN #artificial basilar membrane

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