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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering 한국정밀공학회지 Vol.30 No.6
- 발행연도
- 2013.6
- 수록면
- 644 - 649 (6page)
이용수
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초록· 키워드
오류제보하기
Today, there are lots of progresses in the field of lens researches, especially in the microlens fabrication. Unlike normal lenses, microlens has been widely used as a role of improving the performance of photonic devices which increase the optical precision, and also used in the fields of the display. In this paper, polymer microlenses with 300 μm diameter were replicated through hot-embossing from nickel mold which was fabricated by micro-EDM. After hot-embossing process, the polymer microlenses have a rough surface due to the crater formed by micro-EDM process, which is projected onto the surface of the lenses. The surface of polymer microlenses was polished using solvent vapor to improve the surface roughness of the microlenses without changing their shape. In the experiment, the surface roughness was improved with the processing time and vapor temperature. Also, the roughness improvement was greatly affected by the solubility difference between polymer and solvent.
목차
1. 서론
2. 실험장치 구성 및 방법
3. 실험 결과 및 성능평가
4. 결론
참고문헌
참고문헌 (7)
참고문헌 신청
McCormick, F. B. / 1992 / Optical interconnections using microlens arrays / Opt. Quant. Electron. 24:S465~S477
Wakaki, M. / 1998 / Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser / Applied Optics 37(4):627~631
Mihailov, S. / 1993 / Fabrication of refractive microlens array by excimer laser ablation of amorphous Teflon / Applied Optics 32(31):6211~6218
MacFarlane, D. L. / 1994 / Microjet fabrication of microlens array / IEEE Photonics Technology Letter 6(6):1112~1114
Miyashita, T. / 2007 / Standardization for microlenses and microlens arays / Japanese Journal of Applied Physics 46(8B):5391~5396
Wakaki, M. / 1998 / Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser / Applied Optics 37(4):627~631
Mihailov, S. / 1993 / Fabrication of refractive microlens array by excimer laser ablation of amorphous Teflon / Applied Optics 32(31):6211~6218
MacFarlane, D. L. / 1994 / Microjet fabrication of microlens array / IEEE Photonics Technology Letter 6(6):1112~1114
Miyashita, T. / 2007 / Standardization for microlenses and microlens arays / Japanese Journal of Applied Physics 46(8B):5391~5396
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