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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.13 No.4
- 발행연도
- 2013.8
- 수록면
- 355 - 360 (6page)
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초록· 키워드
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A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. PROPOSED IOP SENSOR AND OPEARTION PRINCIPLE
Ⅲ. IMPLEMENTATION OF THE PROPOSED SENSOR
Ⅳ. MEASUREMENT RESULTS
Ⅴ. DISCUSSION
Ⅵ. CONCLUSIONS
REFERENCES
참고문헌 (9)
참고문헌 신청
1. [학술지(정기간행물)] - Y.-H. Kim / 2005 / Polymer/Metal Based Flexible MEMS Biosensors for Nerve Signal Monitoring and Sensitive Skin / Journal of Semiconductor Technology and Science 5 (1) : 11 ~ 16
2. [학술지(정기간행물)] - C. Lee / 2012 / X-band CMOS power amplifier using mode-locking method for sensor applications / J. of Electromagn. Waves and Appl. 26 (5) : 633 ~ 640
3. [학술지(정기간행물)] - L.-M. Santiago / 2005 / Design of a system for continuous intraocular pressure monitoring / IEEE Transactions on Instrumentation and Measurement 54 (4) : 1534 ~ 1540
4. [학술지(정기간행물)] - A. Baldi / 2003 / A self-resonant frequency-modulated micromachined passive pressure transensor / IEEE Sensors Journal 3 (6) : 728 ~ 733
5. [학술지(정기간행물)] - P. –J. Chen / 2008 / Microfabricated Implantable parylenebased wireless passive intraocular pressure sensors / Journal of Microelectromechanical Systems 17 (6) : 1342 ~ 1351
2. [학술지(정기간행물)] - C. Lee / 2012 / X-band CMOS power amplifier using mode-locking method for sensor applications / J. of Electromagn. Waves and Appl. 26 (5) : 633 ~ 640
3. [학술지(정기간행물)] - L.-M. Santiago / 2005 / Design of a system for continuous intraocular pressure monitoring / IEEE Transactions on Instrumentation and Measurement 54 (4) : 1534 ~ 1540
4. [학술지(정기간행물)] - A. Baldi / 2003 / A self-resonant frequency-modulated micromachined passive pressure transensor / IEEE Sensors Journal 3 (6) : 728 ~ 733
5. [학술지(정기간행물)] - P. –J. Chen / 2008 / Microfabricated Implantable parylenebased wireless passive intraocular pressure sensors / Journal of Microelectromechanical Systems 17 (6) : 1342 ~ 1351
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