A Novel Transmission line model of Cutoff Probe for precise measurement of high density plasma

김시준 ,  이장재 ,  김광기 외 6명

한국진공학회 학술발표회초록집

2016 .02

플라즈마 컷오프 프로브 소개

유신재

진공이야기

2017 .06

Comparative simulation of microwave probes for plasma density measurement and its application

김대웅 ,  유신재 ,  김시준 외 7명

한국진공학회 학술발표회초록집

2016 .02

Microwave Plasma Source Optimization for Thin Film Deposition Applications

Mahmoud A. I. Elga ,  hy

Applied Science and Convergence Technology

2022 .03

Measurement of sheath width using the cutoff probe

김대웅 ,  유신재 ,  김정형 외 2명

한국진공학회 학술발표회초록집

2015 .02

Control of electron energy distribution by hybrid plasma source in low gas pressure

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Ching-Wook Chung

한국진공학회 학술발표회초록집

2020 .08

Characteristics of the Plasma Source for Ground Ionosphere Simulation Surveyed by Disk-Type Langmuir Probe

류광선 ,  이준찬 ,  김손구 외 5명

Journal of Astronomy and Space Sciences

2017 .12

Experimental and numerical study on measurement of effective sheath width around cutoff probe

김대웅 ,  유신재 ,  김정형 외 4명

한국진공학회 학술발표회초록집

2015 .02

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

Measurement of electron density of atmospheric pressure Ne plasma jet by laser heterodyne Interferometer with voltage

Jun Sup Lim ,  Young June Hong ,  Eun Ha Choi

한국진공학회 학술발표회초록집

2015 .08

Ar/NF3 혼합가스 Remote plasma source에서의 플라즈마 밀도 측정 및 Si/SiO₂ 식각률 측정

H.J.Yeom ,  Y.S.Lee ,  S.J.Kim 외 5명

한국진공학회 학술발표회초록집

2018 .08

Creating and probing graphene electron optics with local scanning probes

Joseph A. STROSCIO

한국진공학회 학술발표회초록집

2016 .08

Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma

Si-Jun Kim ,  Won-Nyoung Jeong ,  Young-Seok Lee 외 5명

Applied Science and Convergence Technology

2023 .09

Effect of gas flow rate and applied voltage on electron and gas temperature of atmospheric pressure plasma jet

Linh N. Nguyen ,  Bhagi ,  ath Ghimi 외 2명

한국진공학회 학술발표회초록집

2017 .08

Electron density measurement of Ar spark in atmospheric pressure plasma needle jet using phase modified Michelson interferometry

Jun Sup Lim ,  Young June Hong ,  Eun Ha Choi

한국진공학회 학술발표회초록집

2018 .02

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03

Plasma characterization of a mesh separated dual plasma source by L-probe and QMS

김동훈 ,  최지성 ,  김성봉 외 2명

한국진공학회 학술발표회초록집

2015 .08

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02