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PYROMETER 를 이용한 Chemical Vapor Deposition 이상 공정 감지 시스템
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Type
Proceeding
Author
박상호 (원익아이피에스) 이철 (원익아이피에스) 황혜주 (원익아이피에스) 정성용 (원익아이피에스) 이치영 (원익아이피에스) 박민근 (원익아이피에스) 김지수 (원익아이피에스) 김동욱 (원익아이피에스) 왕현철 (원익아이피에스) 이내일 (원익아이피에스)
Journal
The Korean Vacuum Society 한국진공학회 학술발표회초록집 The 53rd Summer Annual Conference of the Korean Vacuum Society
Published
2017.8
Pages
239 - 239 (1page)

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PYROMETER 를 이용한 Chemical Vapor Deposition 이상 공정 감지 시스템
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#PYROMETER #공정진단 #공정감지 #공정분석

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UCI(KEPA) : I410-ECN-0101-2018-420-001353938