개인구독
소속 기관이 없으신 경우, 개인 정기구독을 하시면 저렴하게
논문을 무제한 열람 이용할 수 있어요.
지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
We developed a real-time three-polarizer spectroscopic ellipsometer based on a new data acquisition algorithm and a general data reduction (the process of extracting the ellipsometric sample parameters from the Fourier coefficients). The data acquisition algorithm measures Fourier coefficients of radiant flux waveform accurately and precisely. The general data reduction is introduced to represent the analytic functions of the standard uncertainties of the ellipsometric sample parameters, and the extracted theoretical values closely agree with the corresponding experimental data. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.
목차
1. 서론
2. SE 이론의 일반화
3. Fourier 계수의 새로운 측정방법
4. SE 측정 불확도 예측 이론식
6. 결론
References
참고문헌 (0)
참고문헌 신청함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Ellipsometric study on the temperature dependent dielectric function of SrTiO₃
한국진공학회 학술발표회초록집
2016 .08
-
Functionalization of silicon surface for effective biosensing : an ellipsometric study
한국진공학회 학술발표회초록집
2016 .08
-
Ellipsometric monitoring of first stages of graphene growth in magnetronplasma-enhanced chemical vapor deposition
한국진공학회 학술발표회초록집
2016 .08
-
Development of a Microspot Spectroscopic Ellipsometer Using Reflective Objectives, and the Ellipsometric Characterization of Monolayer MoS₂
Current Optics and Photonics
2020 .08
-
Scalar Fourier Modal Method for Wave-optic Optical-element Modeling
Current Optics and Photonics
2021 .10
-
Fourier coefficients of weight 2 modular forms of prime level
대한수학회보
2021 .01
-
Multiple change-point estimation in spectral representation
CSAM(Communications for Statistical Applications and Methods)
2022 .01
-
A Study on Image Distortion of 3D-T1-SPACE with Gd Contrast Agent
Journal of Magnetics
2022 .12
-
Instrumentation for Thermal Conductivity Measurement
한국자기학회 학술연구발표회 논문개요집
2022 .05
-
비상저감조치일의 두 지역간 비산먼지 실시간 플럭스 측정 자료의 비교
한국대기환경학회 학술대회논문집
2023 .10
-
Combination of data-dependent, data-independent and full scan data acquisitions to comprehensively profile C. elegans lipidome
한국분석과학회 학술대회
2022 .11
-
Fourier decay of Moran measure with quasi periodic sequence
대한수학회보
2024 .03
-
Improving the ESA CCI Daily Soil Moisture Time Series with Physically Based Land Surface Model Datasets Using a Fourier Time-Filtering Method
한국기상학회 학술대회 논문집
2022 .10
-
FPGA-based 8-channel data acquisition system
한국자기학회 학술연구발표회 논문개요집
2022 .05
-
Research on Multiple-image Encryption Scheme Based on Fourier Transform and Ghost Imaging Algorithm
Current Optics and Photonics
2018 .08
-
A weighted Fourier series with signed good kernels
대한수학회보
2017 .01
-
Fourier series of higher-order Euler functions and their applications
대한수학회보
2018 .01
-
Frequency spectra characterization of noncoding human genomic sequences
Genes & Genomics
2020 .01
-
Smart Factory Big Data를 활용한 공정 이상 탐지 프로세스 적용 사례 연구
응용통계연구
2021 .02
-
Preparation of Nd based nano composite by reduction-diffusion process
한국자기학회 학술연구발표회 논문개요집
2016 .05
이 논문의 저자 정보
이 논문과 함께 이용한 논문
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2019-420-000022176