Development of an RF matching system in an RF inductively coupled plasma (ICP) source for 100 kW negative ion beam

박민 ,  정봉기 ,  김태성 외 2명

한국진공학회 학술발표회초록집

2017 .08

Plasma impedance matching technique for bio plasma RF source

Kwang Ho JANG ,  Bo Ki KIM ,  Jin Joo CHOI 외 2명

한국진공학회 학술발표회초록집

2016 .08

RF임피던스 정합장치 연구

이정수 ,  정성식 ,  이지하 외 4명

한국진공학회 학술발표회초록집

2019 .08

Key issues in the design of innovative RF plasma sources

Hong-Young CHANG

한국진공학회 학술발표회초록집

2016 .08

Fabrication of Potassium Ion Source and its Emission Characteristics

Dae Sun Choi

Applied Science and Convergence Technology

2016 .11

Development o high accuracy VI sensor for RF power systems

김광기 ,  이장재 ,  김시준 외 4명

한국진공학회 학술발표회초록집

2017 .08

Development of high-power RF ion source for neutral beam injectors

Doo-Hee CHANG ,  Min PARK ,  Bong-Ki JUNG 외 4명

한국진공학회 학술발표회초록집

2016 .08

High density micro ion beam by plasma ion source

Masaki SUGAWARA ,  Ha ,  uo KASAHARA 외 4명

한국진공학회 학술발표회초록집

2016 .08

A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters

Ju-Hong Cha ,  Sang-Woo Kim ,  Ho-Jun Lee

Applied Science and Convergence Technology

2021 .05

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Effect of rf bias power on plasma density and electron heating in inductively coupled plasma (ICP)

이호원 ,  김주호 ,  정진욱

한국진공학회 학술발표회초록집

2017 .08

Inductively Coupled Plasma 장치에서 Hybrid Plasma Model을 활용한 C₂F₈/ O₂ 가스의 특성 해석

김환호 ,  이정열 ,  박희성 외 2명

한국진공학회 학술발표회초록집

2019 .08

Inductively Coupled Plasma Discharge Simulation for the Semiconductor Process Considering Impedance Calculation in 3D Asymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .03

Analysis of the Characteristics of Radio Frequency Power Transmission Lines Using a Voltage Current Probe in Low-Pressure Discharge

Chan-Won Pa ,  k ,  Hee-Jung Yeom 외 2명

Applied Science and Convergence Technology

2023 .09

Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma

Aixian Zhang ,  Moo-Young Lee ,  Ho-Jun Moon 외 1명

한국진공학회 학술발표회초록집

2018 .08

A Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources

Deuk-Chul Kwon ,  Nam-Sik Yoon

Applied Science and Convergence Technology

2015 .11

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Investigation of the Driving Frequency Effect on the RF-Driven Atmospheric Pressure Micro Dielectric Barrier Discharges

Hyowon Bae ,  Jung Yeol Lee ,  Hae June Lee

Applied Science and Convergence Technology

2017 .07

Study on Load Impedance Matching Characteristics of Magnetic Coupled Resonant Wireless Power Transfer System

Lijiao Gong ,  Xinheng Li ,  Xuewei Chao 외 3명

Journal of Magnetics

2017 .09

Analysis of Impedance of Microwave Parallel Stripline Resonator Discharge Source for Application of Microplasma System at Atmospheric Pressure

Thanh Hai T ,  an ,  Si Jun Kim 외 1명

Applied Science and Convergence Technology

2019 .07