지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.19 No.2
- 발행연도
- 2019.4
- 수록면
- 196 - 202 (7page)
- DOI
- 10.5573/JSTS.2019.19.2.196
이용수
초록· 키워드
오류제보하기
An FET-type CO₂ sensor using polyethylenimine (PEI) coated single-walled carbon nanotube (SWNT) is investigated. The sensor has a floating-gate (FG) and a control-gate (CG) formed in an interdigitated form in a horizontal direction. SWNT and PEI are sequentially printed on the platform by inkjet printing process. PEI coating reduces the I-V hysteresis of the FET platform and improves the CO₂ sensing properties. Since the sensor has an FG that can store the charge, the threshold voltage of the sensor can be tuned and its calibration is possible. When sensing 2000 ppm of CO₂ gas at room temperature, the DC read bias applied to CG showed very low sensitivity and significant drift characteristics. However, by applying a pulse bias, a response of ~16%, a response time of ~80 s, and a recovery time of ~200 s were obtained.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. EXPERIMENTAL
Ⅲ. RESULTS AND DISCUSSION
Ⅳ. CONCLUSIONS
REFERENCES
참고문헌 (20)
참고문헌 신청
National Oceanic and Atmospheric Administration, Earth System Research Laboratory, Global Monitoring Division, “Trends in atmospheric carbon dioxide,” https://www.esrl.noaa.gov/gmd/ ccgg/trends/graph.html, accessed May 22. 2018.
N. Yamazoe and N. Miura, “Development of gas sensors for environmental protection,” Components, Packaging, and Manufacturing Technology: Part A, IEEE Transactions on, Vol. 18, No. 2, pp. 252-256, Jun., 1995.
M. Morio, et al, “Effect of macrostructural control of an auxiliary layer on the CO2 sensing properties of NASICON-based gas sensors,” Sensors and Actuators B: Chemical, Vol. 139, No. 2, pp. 563- 569, Jun., 2009.
Y. Wang, et al, “Functionalized horizontally aligned CNT array and random CNT network for CO2 sensing,” Carbon, Vol. 117, pp. 263-270, Jun., 2017.
M. Mittal, and A. Kumar, “Carbon nanotube (CNT) gas sensors for emissions from fossil fuel burning,” Sensors and Actuators B: Chemical, Vol. 203, pp. 349-362, Nov., 2014.
M. Morio, et al, “Effect of macrostructural control of an auxiliary layer on the CO2 sensing properties of NASICON-based gas sensors,” Sensors and Actuators B: Chemical, Vol. 139, No. 2, pp. 563- 569, Jun., 2009.
Y. Wang, et al, “Functionalized horizontally aligned CNT array and random CNT network for CO2 sensing,” Carbon, Vol. 117, pp. 263-270, Jun., 2017.
M. Mittal, and A. Kumar, “Carbon nanotube (CNT) gas sensors for emissions from fossil fuel burning,” Sensors and Actuators B: Chemical, Vol. 203, pp. 349-362, Nov., 2014.
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