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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.1
- 수록면
- 29 - 35 (7page)
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초록· 키워드
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The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 ㎜ sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 ㎚ sized standard particles were used for evaluation. The measurement using 5 ㎜ sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.
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참고문헌 (15)
참고문헌 신청
A. A. Scheidemann / 2002 / Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry / J. Vac. Sci. Technol. A 20 : 597 ~ 604
A.K. Knight / 2002 / The development of a micro- Faraday array for ion detection / International Journal of Mass Spectrometry 215 : 131 ~ 139
Jeonggil Na / 2009 / Real-time diagnosis of nano-sized contaminant particles generated in TiN metal organic chemical vapor deposition / Applied Physics Express 2 : 035501 ~
Jeonggil Na / 2010 / Effects of process variables on TiN particles formation during metallorganic chemical vapor deposition / Electrochemical and Solid-State Letters 13 : 248
Paul J. Ziemann / 1995 / Electron impact charging properties of size-selected, submicrometer organic particles / J. Phys. Chem. 99 : 5126 ~ 5138
A.K. Knight / 2002 / The development of a micro- Faraday array for ion detection / International Journal of Mass Spectrometry 215 : 131 ~ 139
Jeonggil Na / 2009 / Real-time diagnosis of nano-sized contaminant particles generated in TiN metal organic chemical vapor deposition / Applied Physics Express 2 : 035501 ~
Jeonggil Na / 2010 / Effects of process variables on TiN particles formation during metallorganic chemical vapor deposition / Electrochemical and Solid-State Letters 13 : 248
Paul J. Ziemann / 1995 / Electron impact charging properties of size-selected, submicrometer organic particles / J. Phys. Chem. 99 : 5126 ~ 5138
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