지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.
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참고문헌 (10)
참고문헌 신청
A. S. Nezhad / 2013 / PDMS microcantilever-based flow sensor integration for lab-on-a-chip / IEEE Sens. J 13 (2) : 601 ~ 609
C. J. Kim / 2006 / Fabrication of a MEMS-based fine-pitch cantilever-type probe unit / Proc. of IEEE Conf. on Sensors : 530 ~ 533
F. Wang / 2009 / MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing / IEEE J. Microelectromech. Syst 18 (4) : 933 ~ 941
J. C. Yang / 2006 / Fabrication of a MEMS-based fine-pitch cnatilever-type probe unit / Proc. Intern. Microprocesses and Nanotechnology Conf : 328 ~ 329
O. C. Jeong / 2006 / All PDMS pneumatic microfinger with bidirectional motion and its application / J. Microelectromech. Syst 15 (4) : 896 ~ 903
C. J. Kim / 2006 / Fabrication of a MEMS-based fine-pitch cantilever-type probe unit / Proc. of IEEE Conf. on Sensors : 530 ~ 533
F. Wang / 2009 / MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing / IEEE J. Microelectromech. Syst 18 (4) : 933 ~ 941
J. C. Yang / 2006 / Fabrication of a MEMS-based fine-pitch cnatilever-type probe unit / Proc. Intern. Microprocesses and Nanotechnology Conf : 328 ~ 329
O. C. Jeong / 2006 / All PDMS pneumatic microfinger with bidirectional motion and its application / J. Microelectromech. Syst 15 (4) : 896 ~ 903
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