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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제14권 제1호
- 발행연도
- 2013.1
- 수록면
- 9 - 11 (3page)
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초록· 키워드
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The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages,such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 Ω/□ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer.
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참고문헌 (12)
참고문헌 신청
C. G. Granqvist / 1990 / / Thin Solid Films 193-194 : 730 ~
D.R.Sahu / 2006 / / Thin Solid Films 515 : 876 ~
G. Haacke / 1976 / / J. Appl. Phys 47 : 4086 ~
G. Leftheriotis / 1997 / / Thin Solid Films 306 : 92 ~
Jeong Soo HongKim / 2011 / Characteristic of Al-In-Sn-ZnO Thin Film Prepared by FTS System with Hetero Targets / Transactions on Electrical and Electronic Materials 12 (2) :
D.R.Sahu / 2006 / / Thin Solid Films 515 : 876 ~
G. Haacke / 1976 / / J. Appl. Phys 47 : 4086 ~
G. Leftheriotis / 1997 / / Thin Solid Films 306 : 92 ~
Jeong Soo HongKim / 2011 / Characteristic of Al-In-Sn-ZnO Thin Film Prepared by FTS System with Hetero Targets / Transactions on Electrical and Electronic Materials 12 (2) :
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