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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.23 No.3
- 발행연도
- 2014.5
- 수록면
- 145 - 150 (6page)
이용수
초록· 키워드
오류제보하기
MgO thin films were deposited by internal ICP-assisted reactive-magnetron sputtering with bipolar pulse bias on a substrate to suppress random arcs. Mg is reactively sputtered by a bipolar pulsed DC power of 100 kHz into ICP generated by a dielectrically shielded internal antenna. At a mass flow ratio of Ar/O2 = 10 : 2 and an ICP/sputter power ratio of 1 : 1, optimal film properties were obtained (a powder-like crystal orientation distribution and a RMS surface roughness of approximately 0.42 nm). A bipolar pulse substrate bias at a proper frequency (∼a few kHz) prevented random arc events. The crystalline preferred orientations varied between the (111), (200) and (220) orientations. By optimizing the plasma conditions, films having similar bulk crystallinity characteristics (JCPDS data) were successfully obtained.
목차
I. Introduction
II. Experimental
III. Results and Discussions
IV. Conclusion
References
참고문헌 (14)
참고문헌 신청
1. [학술지(정기간행물)] - M. Hashimoto / 2000 / / Rev. Sci. Instrum 71 : 999 ~
2. [학술지(정기간행물)] - K. H. Nam / 2003 / / Surf. Coat. Technol 174 : 212 ~
3. [학술지(정기간행물)] - B. W. Byrum Jr. / 1975 / / IEEE Trans. Electron Devices 22 : 685 ~
4. [학술지(정기간행물)] - M. P. Delpanke-Ogletree / 1999 / / J. Mater. Res 14 : 2133 ~
5. [학술지(정기간행물)] - M. Yamashita / 1989 / / J. Vac. Sci. Technol A 7 : 151 ~
2. [학술지(정기간행물)] - K. H. Nam / 2003 / / Surf. Coat. Technol 174 : 212 ~
3. [학술지(정기간행물)] - B. W. Byrum Jr. / 1975 / / IEEE Trans. Electron Devices 22 : 685 ~
4. [학술지(정기간행물)] - M. P. Delpanke-Ogletree / 1999 / / J. Mater. Res 14 : 2133 ~
5. [학술지(정기간행물)] - M. Yamashita / 1989 / / J. Vac. Sci. Technol A 7 : 151 ~
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