지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.23 No.5
- 발행연도
- 2014.9
- 수록면
- 279 - 283 (5page)
이용수
초록· 키워드
오류제보하기
Al doped ZnO thin films have been deposited by a RF magnetron sputtering technique from a ZnO (2 wt.% Al₂O₃) target onto glass substrates heated at temperature ranging from RT to 400℃. X-ray diffraction analysis shows that the deposits have a preferential growth along the c-axis of a hexagonal structure. The full with at half maximum decreases from 0.45 to 0.43° in the studied temperature range. The root main square surface roughness increases with substrate temperature from 1.89 to 2.67 nm. All films are transparent up to 80% in the visible wavelength range and the adsorption edge is red-shifted with substrate temperature from RT to 400℃. The sheet resistance increases from 92 ohm/sq to 419 ohm/sq when the deposition temperature increases from RT to 400℃. The increment of sheet resistance is caused by lowered carrier concentration resulting from an increase in surface roughness.
목차
Ⅰ. Introduction
Ⅱ. Experimental Procedure
Ⅲ. Results and Discussion
Ⅳ. Conclusion
References
참고문헌 (13)
참고문헌 신청
1. [학술지(정기간행물)] - J. Muller / 2004 / / Sol. Energy 77 : 917 ~
2. [학술지(정기간행물)] - T. Minami / 1996 / / J. Vac. Sci. Technol. A 14 : 1689 ~
3. [학술지(정기간행물)] - C. Guillen / 2011 / / Thin Solid Films 520 : 1 ~
4. [학술지(정기간행물)] - J. Mass / 2003 / / Mater. Sci. Eng. B 103 : 9 ~
5. [학술지(정기간행물)] - J. Nomoto / 2011 / / Thin Solid Films 520 : 1400 ~
2. [학술지(정기간행물)] - T. Minami / 1996 / / J. Vac. Sci. Technol. A 14 : 1689 ~
3. [학술지(정기간행물)] - C. Guillen / 2011 / / Thin Solid Films 520 : 1 ~
4. [학술지(정기간행물)] - J. Mass / 2003 / / Mater. Sci. Eng. B 103 : 9 ~
5. [학술지(정기간행물)] - J. Nomoto / 2011 / / Thin Solid Films 520 : 1400 ~
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2019-420-001275128