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Comprehensive Surface analysis of single/multi-layered film by FIB-SEM and AFM
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Type
Proceeding
Author
정영희 (한국화학융합시험연구원) 하영권 (한국화학융합시험연구원) 신혜철 (한국화학융합시험연구원) 정정설 (한국화학융합시험연구원)
Journal
The Korean Society of Analytical Sciences 한국분석과학회 학술대회 The 64th Biannual Conference of The Korean Society of Analytical Sciences
Published
2020.6
Pages
115 - 115 (1page)

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Comprehensive Surface analysis of single/multi-layered film by FIB-SEM and AFM
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UCI(KEPA) : I410-ECN-0101-2020-433-000869395