지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.1
- 수록면
- 16 - 21 (6page)
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이 논문의 연구 히스토리 (6)
2010
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초록· 키워드
오류제보하기
SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.
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등록된 정보가 없습니다.
참고문헌 (12)
참고문헌 신청
I.-T. Tang / 2003 / A novel integrable surface acoustic wave notch filter / Solid-State Electronics 47:2063~2066
K. Länge / 2008 / Surface acoustic wave biosensors / Anal Bioanal Chem :1509~1519
J. Kondoh / 2008 / Development of methanol sensor using a shearhorizontal surface acoustic wave device for a directmethanol fuel cell / Sensors and Actuators B 129:575~580
M. Z. Atashbar / 2004 / 3-D Finite-Element Simulation Model of SAW Palladium Thin Film Hydrogen Sensor / IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference :549~553
W. Robbins / 1988 / A simple phenomenological model of tunable SAW devices using magnetostrictive thin films / IEEE Trans. Ultrason. Ferroelect., Freq. Contr. 35:718~722
K. Länge / 2008 / Surface acoustic wave biosensors / Anal Bioanal Chem :1509~1519
J. Kondoh / 2008 / Development of methanol sensor using a shearhorizontal surface acoustic wave device for a directmethanol fuel cell / Sensors and Actuators B 129:575~580
M. Z. Atashbar / 2004 / 3-D Finite-Element Simulation Model of SAW Palladium Thin Film Hydrogen Sensor / IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference :549~553
W. Robbins / 1988 / A simple phenomenological model of tunable SAW devices using magnetostrictive thin films / IEEE Trans. Ultrason. Ferroelect., Freq. Contr. 35:718~722
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