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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.29 No.4
- 발행연도
- 2020.7
- 수록면
- 77 - 81 (5page)
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초록· 키워드
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In this study, we confirmed through experiments that a noise signal appears in the low-mass region when measuring plasma using a quadrupole mass spectrometer. We conducted a numerical analysis to identify the cause of this occurrence. It was determined that high-energy ions generated in plasma are not filtered in the low quadrupole filter voltage region owing to the high velocity of the ions. We thus detected the signal in the low-mass region based on the stability area. In this paper, we identify through numerical analysis the quadrupole filter length and the radius of the incident ion beam that effectively reduce low-mass noise.
목차
ABSTRACT
1. Introduction
2. Experimental details
3. Simulation details
4. Conclusions
References
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