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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2021.2
- 수록면
- 209 - 209 (1page)
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Ferroelectric materials, which can phase transition, were discovered that have many properties and led to huge large of applications in nonvolatile memory. We fabricate HfO<sub>2</sub> and Al to make the HAO(Hafnium Aluminum oxide) capacitance between two Molybdenum metal and connected to the gate of the ... 전체 초록 보기
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