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레이저 공정을 이용한 니켈 기반 유연 온도 센서 제작 및 성능 평가
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Type
Proceeding
Author
Ho Le Duc Anh (가천대학교) Phuoc Loc Truong (가천대학교) 김호준 (가천대학교) Vu Binh Nam (가천대학교) 이대호 (가천대학교)
Journal
The Korean Society of Mechanical Engineers 대한기계학회 춘추학술대회 대한기계학회 마이크로/나노공학부문 2021년도 춘계학술대회
Published
2021.5
Pages
120 - 120 (1page)

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레이저 공정을 이용한 니켈 기반 유연 온도 센서 제작 및 성능 평가
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We introduce a facile and rapid laser digital patterning (LDP) process to fabricate Ni-based flexible resistance temperature detectors (RTDs). Ni-based RTDs are directly generated on a thin flexible polyimide substrate (thickness: 50 μm) by laser-induced reductive sintering of a solution-processed nonstoichiometric nickel oxide (NiOx) nanoparticle thin film under ambient conditions. The shape of RTDs can be easily adjusted by controlling computer-aided design (CAD) data without using the physical patterning mask while the sensitivity of the sensors can be maint ... View All
#Temperature sensors(온도센서) #Laser(레이저) #Nickel(니켈)

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