메뉴 건너뛰기
.. 내서재 .. 알림
소속 기관/학교 인증
인증하면 논문, 학술자료 등을  무료로 열람할 수 있어요.
한국대학교, 누리자동차, 시립도서관 등 나의 기관을 확인해보세요
(국내 대학 90% 이상 구독 중)
로그인 회원가입 고객센터 ENG
주제분류

추천
검색

논문 기본 정보

자료유형
학술저널
저자정보
Chang Weon Song (Pusan National University) Rongguang Jin (Pusan National University) Nong Moon Hwang (Seoul National University) Kwang Ho Kim (Pusan National University)
저널정보
대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.15 No.5
발행연도
2019.1
수록면
630 - 638 (9page)

이용수

표지
📌
연구주제
📖
연구배경
🔬
연구방법
🏆
연구결과
AI에게 요청하기
추천
검색

초록· 키워드

오류제보하기
As a carbon source for hot filament chemical vapor deposition of boron-doped diamond (BDD), cost-effective acetone(C3H6O) was used instead of commonly used methane gas. In this case, tantalum filaments turned out to be more suitablethan tungsten filaments because tantalum is more oxidation-resistant and can be heated to much higher temperature withoutevaporation than tungsten. As the acetone flux was varied, the hydrogen flux was also varied so that the mixture of acetoneand hydrogen fluxes was fixed at 500 standard cubic centimeter per minute (sccm). Trimethyl borate (TMB) was used asa boron source. As the acetone flux was varied, the TMB flux was also varied so that the boron doping of 11,400 ppmwas maintained. As the flux of acetone was increased from 90 to 170 sccm, the grain size and the film thickness of BDDincreased. In this range of acetone fluxes, the films showed well-defined (111) facets, indicating that the high quality diamondwas deposited. When the acetone flux was increased to 210 sccm, the grain size decreased abruptly and the film thickness,which represents the deposition rate, decreased also. When the acetone flux was increased to 250 sccm, the grain size furtherdecreased, producing a cauliflower structure and the film thickness further decreased. The potential window, which is measuredas electrochemical properties of BDD, increased as the acetone flux increased from 90 to 170 sccm and did not changemuch between 170 and 250 sccm. From this experiment, it was confirmed that varying the flux of acetone could control themorphology, the growth rate and the electrochemical properties of the BDD film.

목차

등록된 정보가 없습니다.

참고문헌 (32)

참고문헌 신청

함께 읽어보면 좋을 논문

논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!

이 논문의 저자 정보

최근 본 자료

전체보기

댓글(0)

0