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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2021.2
- 수록면
- 8 - 15 (8page)
이용수
초록· 키워드
오류제보하기
An elliptical zone plate (EZP) array is important in off-axis optical systems because it provides two advantages. First, the residual beam and the main source are not focused in the same direction and second, the light from the observation plane is not reflected back towards the beam source. However, the fill factor of the previous EZP array was about 76% which was a little low. Hence, this EZP array could not collect the maximum amount of illumination light, which affected the overall optical performance of the lens array. In this study, we propose a new EZP array design with a 97.5% fill factor used in off-axis imaging system for enhancement of brightness and contrast. Then, direct laser lithography was used to fabricate the high fill factor EZP array by moving the XY linear stage of the system in a zigzag motion. The imaging properties of the proposed EZP array were experimentally verified at the focal plane and compared with the previous model.
목차
Ⅰ. INTRODUCTION
Ⅱ. EXPERIMENTAL SETUP
Ⅲ. DESIGN OF AN EZP ARRAY WITH HIGH FILL FACTOR
Ⅳ. FABRICATION PROCESS
Ⅴ. OPTICAL PERFORMANCE EVALUATION
Ⅵ. CONCLUSION
REFERENCES
참고문헌 (27)
참고문헌 신청
M. A. Golub / 1998 / Diffractive optical elements for biomedical applications / Proc. SPIE 3199:220~231
A. Goncharsky / 2016 / Diffractive optical element for creating visual 3D images / Opt. Express 24:9140~9148
H. Deng / 2019 / High-resolution augmented reality 3D display with use of a lenticular lens array holographic optical element / J. Opt. Soc. Am. A 36:588~593
A. Erdmann / 2011 / Modeling of mask diffraction and projection imag-ing for advanced optical and EUV lithography / J. Mod. Opt 58:480~495
D. H. Dinh / 2019 / Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array / Opt. Laser Technol 113:407~415
A. Goncharsky / 2016 / Diffractive optical element for creating visual 3D images / Opt. Express 24:9140~9148
H. Deng / 2019 / High-resolution augmented reality 3D display with use of a lenticular lens array holographic optical element / J. Opt. Soc. Am. A 36:588~593
A. Erdmann / 2011 / Modeling of mask diffraction and projection imag-ing for advanced optical and EUV lithography / J. Mod. Opt 58:480~495
D. H. Dinh / 2019 / Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array / Opt. Laser Technol 113:407~415
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