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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2023.4
- 수록면
- 157 - 165 (9page)
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초록· 키워드
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We propose a highly directional waveguide grating antenna for an optical phased array, achieving high directionality of more than 97% by interleaving the trenches with different etching depths in the silicon nitride layer, and adopting a multilayered structure. Meanwhile, the multilayered structure reduces the perturbation strength, which enables a centimeter-scale radiation length. The beam-steering range is 13.2°, with a wavelength bandwidth of 100 nm. The 1-dB bandwidth of the grating is 305 nm. The multilayered grating structure has a large tolerance to the fabrication variation and is compatible with CMOS fabrication techniques.
목차
I. INTRODUCTION
II. DESIGN PRINCIPLE
III. RESULTS
IV. CONCLUSION
REFERENCES
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