지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
The development of lead-free ferroelectric and piezoelectric materials is required from the view point of environmental preservation. Among various lead-free materials, (K<sub>0.5</sub>Na<sub>0.5</sub>)NbO<sub>3</sub> (KNN) has attracted much attention due to its excellent ferroelectric and piezoelectric properties. In this study, high-quality Mn-doped (K<sub>0.5</sub>Na<sub>0.5</sub>)NbO<sub>3</sub> (KNMN) films were deposited on Pt/TiO<sub>2</sub>/SiO<sub>2</sub>/Si substrates by using the sol-gel method. For various numbers of coating cycles; the KNMN films have thicknesses of around 0.8, 1.0, 1.5 and 2.0 μm, respectively. The effective piezoelectric coeffi- cient (d<sub>33,eff</sub>) of the KNMN films was analyzed using a home-made laser Doppler vibrometer that could measure large millimeter-scale areas. The average d<sub>33,eff</sub> of a 2-μm-thick KNMN film was measured to be around 120 pm/V, which is comparable to those of lead-based materials and higher than those of other lead-free piezoelectric film alternatives.
목차
I. Introduction
II. Experimental details
III. Results and discussion
IV. Conclusion
REFERENCES
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