지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 임권택
- 발행연도
- 2013
- 저작권
- 부경대학교 논문은 저작권에 의해 보호받습니다.
이용수5
이 논문의 연구 히스토리 (3)
- 이 논문의 후속연구가 궁금하신가요?
- 연관 학술논문 또는 학술발표를 통해 보다 발전된 연구결과를 확인하실 수 있습니다.
- 이 논문의 연구 히스토리 확인하기
초록· 키워드
오류제보하기
An effective drying technique was developed using supercritical carbon dioxide (scCO2) to prevent pattern collapse that may arise during semiconductor fabrication by cleaning process. Efforts were undertaken to mitigate the limitaion of conventional wet drying solvent (like IPA) by scCO2. The possibility of the substitution of IPA by scCO2 were evaluated. It was observed that the solubility of IPA was 30 wt% at 40 ℃ and 140 bar, though without stirring it took long time to dissolve. However, it was observed that IPA could be quickly mixed with scCO2 within 30 second by controlling flow of scCO2. The residual amount of IPA was quantified by VOC (Volatile Organic Compounds) method. The effect of flow time, temperature, and pressure on the removal of IPA was also examined.
Based on the above results, the stiction phenomenon can be detected by using a high aspect ratio MEMS cantilever beam. The aspect ratio increased if flow time was longer. A cantilever beam having aspect ratio of 65 can be fabricated within 12 minute. The drying efficiency of MeOH and EtOH were compared with IPA, but the performance was not encouraging. Applying repetitive pulse processing system with scCO2 drying technique was found to be superior.
Finally, micro-sized poly-Si cantilevers with high aspect ratios 75 were fabricated successfully without any stiction using this scCO2 protocol. It is highly expected that this improved method would find versatile applications in the next generation MEMS.
Based on the above results, the stiction phenomenon can be detected by using a high aspect ratio MEMS cantilever beam. The aspect ratio increased if flow time was longer. A cantilever beam having aspect ratio of 65 can be fabricated within 12 minute. The drying efficiency of MeOH and EtOH were compared with IPA, but the performance was not encouraging. Applying repetitive pulse processing system with scCO2 drying technique was found to be superior.
Finally, micro-sized poly-Si cantilevers with high aspect ratios 75 were fabricated successfully without any stiction using this scCO2 protocol. It is highly expected that this improved method would find versatile applications in the next generation MEMS.
목차
1. 서 론‥‥ 12. 실험 ‥‥ 62.1. 재료 및 시약‥‥ 62.2. 실험 방법‥‥ 82.2.1. 용해도 측정‥‥ 82.2.2. scCO2 drying system‥‥ 93. 결과 및 고찰‥‥ 123.1. 초임계 이산화탄소에 대한 IPA용해도 ‥‥123.1.1. IPA용해도 평가‥‥123.1.2 IPA 용해를 위한 flow 효과‥‥ 133.2. IPA 제거율 평가 ‥‥163.2.1. Flow 속도에 따른 IPA제거율‥‥ 163.2.2. VOC분석을 이용한 IPA내부 잔량 분석‥‥ 193.2.3. 온도, 압력에 따른 IPA 제거 효과‥‥ 213.3. MEMS 구조물을 이용한 초임계 이산화탄소 건조 효과조사 ‥‥243.4. 공정 변화를 이용한 성능 평가‥‥ 293.4.1. MeOH, EtOH, IPA 의 비교 ‥‥293.4.2. Pulse 이용한 건조 효과 ‥‥314. 결론‥‥ 335. 참고문헌‥‥ 35
최근 본 자료
댓글(0)
0