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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 김태규
- 발행연도
- 2014
- 저작권
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초록· 키워드
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Diamond like cabon(DLC) film is amorphous of carbon-carbon or carbon-hydrogen covalent bonding structure, which have similar property with diamond such as abrasion resistance, high hardness, chemical stability, high thermal conductivity and high transmittance(between visible light and ultraviolet). Due to the excellent properties referred above, it is suggested to apply in various field such as aerospace, biological and mechanical fields.
However, a few disadvantages of DLC coatings can derail certain applications. For example, high internal stresses of DLC coatings lead to poor adhesion of the coatings to some substrate materials, which also restricts the thickness of the coatings. Many researchers have doped DLC with different impurities to address this issue. By doping nitrogen into DLC coatings, the bond structure, tribological behavior, surface energy, roughness and adhesive strength of the coatings can be modified.
The surface of an ideal roll mold should have low adhesion and friction coefficient along with high hardness and excellent wear resistance. With these regards, DLC coatings with superior properties become a promising candidate for protective coatings.
In this study, the DLC thin film was not used as a protective coating. Instead, we had applied micro pattern consisting of only DLC film. We have selectively etched DLC film by using lithography and lift-off process. In this way, we had fabricated DLC micro pattern on aluminum roll mold. And we have formed this pattern on the PET film by UV curing resin. And then we have analyzed dimension and form of the DLC micro pattern on roll mold and hardness, adhesion, wear characteristics, Raman spectroscopic of nitrogen doped DLC film.
However, a few disadvantages of DLC coatings can derail certain applications. For example, high internal stresses of DLC coatings lead to poor adhesion of the coatings to some substrate materials, which also restricts the thickness of the coatings. Many researchers have doped DLC with different impurities to address this issue. By doping nitrogen into DLC coatings, the bond structure, tribological behavior, surface energy, roughness and adhesive strength of the coatings can be modified.
The surface of an ideal roll mold should have low adhesion and friction coefficient along with high hardness and excellent wear resistance. With these regards, DLC coatings with superior properties become a promising candidate for protective coatings.
In this study, the DLC thin film was not used as a protective coating. Instead, we had applied micro pattern consisting of only DLC film. We have selectively etched DLC film by using lithography and lift-off process. In this way, we had fabricated DLC micro pattern on aluminum roll mold. And we have formed this pattern on the PET film by UV curing resin. And then we have analyzed dimension and form of the DLC micro pattern on roll mold and hardness, adhesion, wear characteristics, Raman spectroscopic of nitrogen doped DLC film.
목차
1. 서 론 12. 이론적 배경 32.1. 마이크로패턴 제작 32.1.1. 포토리소그래피 32.1.2. 포토레지스트 72.1.3. 리프트오프 102.2. 다이아몬드상카본 122.2.1. DLC 코팅의 구조와 기본물성 122.2.2. DLC 코팅의 합성방법 162.2.3. 질소도핑 DLC 173. 실험방법 183.1. Roll 금형 제작 및 표면처리 183.2. Roll 금형에 DLC 패턴 제작 203.2.1. Roll 금형에 DLC 증착 243.2.2. Roll 금형에 포토리소그래피 공정 273.2.3. Roll 금형에 DLC 패턴 증착 293.2.4. Roll 금형에 Lift-off 314. 결과 및 고찰 324.1. DLC 마이크로 패턴 치수분석 324.2. 질소도핑 DLC 박막의 라만 분광분석 434.3. 질소도핑 DLC 박막의 경도 특성평가 454.4. 질소도핑 DLC 박막의 부착력 특성평가 484.5. 질소도핑 DLC 박막의 마모 특성평가 525. 결 론 556. 참고문헌 577. Abstract 60
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