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논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 유천열
- 발행연도
- 2014
- 저작권
- 인하대학교 논문은 저작권에 의해 보호받습니다.
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Magnetic properties of CoFeB are being actively studied because it is possible to candidate materials for spin transfer torque magnetic random access memory (STT-MRAM) application. The switching current density of spin transfer torque magnetic random access memory is known very sensitive on exchange stiffness constant. In this work, the exchange stiffness constant of annealed Co40Fe40B20 thin films of 28-nm-thickness investigate using the Brillouin light scattering. The Brillouin light scattering has been used to study thermally excited surface and bulk spin-wave modes in magnetic materials. We prepare the sample of two series. The first series CoFeB was fabricated on MgO(100) substrate by using DC magnetron sputtering system. After a films growth, they are annealed at as deposit, 200, 300, 400 oC for 1 hour. The second series fabricated CoFeB with MgO buffer layer in the same method. For the first series samples, we determined the saturation magnetization values from 13.80 to 14.06 kOe by changing the annealing temperature. The value of the exchange stiffness constant determined from 1.10 to 1.18 x 10-11 J/m by changing the annealing temperature. As a second series samples, saturation magnetization values from 10.49 to 11.30 kOe and value of the exchange stiffness constant is from 0.73 to 0.81 x 10-11 J/m by changing the annealing temperature. In order to checking the validity of the extracted values of magnetic property, we also measured the Fe, Co, and B atomic compositional ratio using XPS depth profile for the samples. We compared the atomic compositional ratio with magnetic properties such as exchange stiffness constant.
목차
1. Introduction 12. Theory 32.1 Spin-waves in single magnetic layer 32.2 Exchange stiffness constant 63. Experimental techniques 73.1 Brillouin light scattering measurement system 73.1.1 Inelastic light scattering 93.1.2 Tandem Fabry-Perot interferometer 133.2 X-ray photoelectron spectroscopy 194. Experimental results and discussion 214.1 Sample fabrication 214.2 Result and discussion of BLS measurement 234.2.1 MgO/CoFeB/Ta sample BLS measurement 234.2.2 MgO/MgO/CoFeB/Ta sample using MgO buffer layer BLS measurement 294.3 Annealing dependence of CoFeB sample XPS depth profile measurement 345. Conclusion 406. Reference 42
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