The Cr based ternary nitrides, the addition of transition elements and other metals such as Si, Al, and Mo, could revealed improved hardness, high temperature oxidation resistance, and wear resistance compared to traditional chromium nitrides for their elemental and structural enhancement. Performance of these coatings are dependent on the process parameters such as temperature, working pressure, and substrate bias etc. of PVD (Physical vapor deposition) method applied. These of working pressure and substrate bias could affect to the crystal growth, crystal orientation, and mechanical properties of the coatings. In this study, the Cr-Al-N coatings with various substrate bias voltage and working pressure were deposited by hybrid PVD method which consist of AIP (Arc ion plating) and UBM (Unbalanced magnetron) sputtering. The microstructure and phase evolution, hardness SEM(Scanning electron microscopy), XRD (X-ray diffraction), XPS (X-ray photoelectron spectroscopy), and nano-indentation. The mechanical properties such as elastic modulus, adhesion, friction coefficient, wear rate were investigated using, scratch test, and friction-wear test, respectively. The decrease of surface droplet and increase of adhesion strength were expected due to increasing of resputtering effect as increase of substrate bias voltage. From the XRD results the CrN phase were found with (111) and (220) plane for all of the coating specimens. The increase of lattice parameter of CrN phase is expected due to substitution of Al. The XPS results indicated that the CrAlN coatings have (Cr,Al)N phase. All coatings exhibited 26~31GPa of hardness, and 230~290GPa of Elastic modulus, respectively. The friction coefficient and wear rate of Cr-Al-N coating decreased from 0.4597 to 0.2244, and from 2.0022×10-12 m2/N to 1.3120×10-13 m2/N, respectively with increasing substrate bias voltage up to -200V.