지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 정명진
- 발행연도
- 2018
- 저작권
- 한국산업기술대학교 논문은 저작권에 의해 보호받습니다.
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Depending on the sustainable development of science and technology, the demand of high degree of integration of the production systems in semiconductor industry and the ultra-precision machines in mechanical industry are increasing. There are many disturbance, like temperature, vibration and so on, in the production systems and ultra-precision machines. The disturbances have to be handled, eliminated, and isolated not to lower their performance. Therefore, this paper presents a 3-DOF vibration isolation system using H-infinity control for isolating disturbance like ground vibration.
The main objectives of this paper are designing system model of uncertainty of active vibration isolation system to expend reliability range of designed controller. The main uncertainty of the system is selected as the mass of the system and payload, the stiffness of the spring, and the damping component of the system. Because of the chosen components are the dominant parameters in the system. In order to verify the performance of the designed active vibration isolation system, the transmissibility was calculated by measuring the vibration of the upper plate and lower plate of each axis, and the results were compared with the PID controller.
In this paper, we design the active vibration isolator using electro magnetic actuator and apply the H-infinity controller through the uncertainty modeling. Finally, constructing the proposed AVI system and controlling the system and evaluate its performance.
The main objectives of this paper are designing system model of uncertainty of active vibration isolation system to expend reliability range of designed controller. The main uncertainty of the system is selected as the mass of the system and payload, the stiffness of the spring, and the damping component of the system. Because of the chosen components are the dominant parameters in the system. In order to verify the performance of the designed active vibration isolation system, the transmissibility was calculated by measuring the vibration of the upper plate and lower plate of each axis, and the results were compared with the PID controller.
In this paper, we design the active vibration isolator using electro magnetic actuator and apply the H-infinity controller through the uncertainty modeling. Finally, constructing the proposed AVI system and controlling the system and evaluate its performance.
목차
목차 ⅰ그림 목차 ⅱ표 목차 ⅲ초록 ⅳ제 1 장 서 론1.1 연구배경 11.2 연구목표 41.3 논문구성 5제 2 장 시스템의 분석 및 모델링2.1 3자유도 능동 제진대 62.2 수동 제진기 102.3 능동 제진기 122.3.1 할바흐 자석배열 132.4 시스템 모델링 152.4.1 설계 요구조건 152.4.2 수동제진기의 동역학적 모델 162.4.3 구동기의 운동학적 모델링 202.4.4 센서의 운동학적 모델링 222.4.5 센서 242.5 가진기 27제 3 장 H-Infinity 제어기 설계3.1 H∞ 제어기 293.1.1 일반적인 H∞ 문제 293.2.2 시스템 불확실성 모델링 313.2.3 제어기의 설계 사양 37제 4 장 시스템 구성 및 실험4.1 하드웨어 제작 424.2 실험의 구성 434.3 실험결과 44제 5 장 고찰 및 결론감사의 글 58
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