With the rapid advancement of electronic devices, the increase in demand for semiconductors has led to an increase in semiconductor production. In addition, there is a demand for the development of inspection equipment capable of inspecting by increasing the number of semiconductor chips per cycle. The chamber controls the temperature of semiconductor chips among test equipment. Thus, the chamber is composed of a blower that causes air flow inside the chamber and a cooling system that cools the air in the chamber.
Heat generated by energization in a semiconductor chip mounted inside the chamber is transferred to an air flow inside the chamber supplied through a cooling system. Air that has received heat from the semiconductor chip is heated and circulated back to the cooling system. During this process, if heat generated from the semiconductor chips mounted in an array in the chamber is not smoothly removed, performance degradation or deterioration of the semiconductor chips may occur during the test process. In a complex space, that is, a test board rack, in which a plurality of substrates having an array of semiconductor chips is formed inside the chamber, a uniform airflow needs to be supplied to the chips on each substrate to maintain the same test conditions.
In this study, a test chamber configured in the form of a continuous chamber was studied to inspect a large amount of semiconductor chips. First, the cycle analysis and design of the refrigeration system constituting the test chamber was performed to understand the set temperature and heat load characteristics of the chamber, and a constant temperature experiment was performed and compared by constructing an actual device. Furthermore, the effect of the fluid flow and internal shape inside the test chamber on the temperature and heat generation of the semiconductor chip inside the chamber was analyzed analytically. In addition, the same chamber as the model used in the numerical analysis study was fabricated, the temperature of the array chip according to the internal fluid flow was measured through experiments, and the refrigeration cycle performance characteristics while maintaining the environmental composition of the chamber were compared with the analysis.