Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Microstructure and Corrosion Properties of TiNX Thin Films Prepared by High Density Plasma Reactive Magnetron Sputtering with Electromagnetic Field System

김정혁 ,  박지봉 ,  송풍근

한국진공학회 학술발표회초록집

2011 .02

A study on the optical and electrical properties of nickel oxide thin films deposited by reactive magnetron sputtering process

Seong woo Jang ,  Sehoon Hwang ,  Sang-Ho Lim 외 1명

한국진공학회 학술발표회초록집

2017 .02

Structural and Optical Properties of CdS Thin Films Deposited by R.F. Magnetron Sputtering

황동현 ,  안정훈 ,  손영국

한국진공학회 학술발표회초록집

2011 .02

Microstructures, electrical and optical properties of NiO films deposited by reactive magnetron sputtering at various oxygen working pressures

S. C. CHEN ,  C. F. LU ,  M. H. LIN 외 3명

한국진공학회 학술발표회초록집

2016 .08

Preparation of Boron Carbide Thin Films by DC Magnetron Reactive Sputtering

K. E. Lee ,  C. H. Kim ,  C. O. Kim

한국자기학회 학술연구발표회 논문개요집

2007 .05

Properties of Boron Carbide Thin Films Deposited by Partially Reactive Magnetron Sputtering

K. E. Lee ,  C. O. Kim ,  J. H. Kim 외 4명

한국자기학회 학술연구발표회 논문개요집

2002 .12

Structure and magnetic properties of Ni - Mn - Ga thin films deposited by dc - magnetron sputtering

P. J. Kim ,  B. S. Hong ,  S. Y. Pa 외 3명

한국진공학회 학술발표회초록집

2005 .02

DC Magnetron Sputtering 방법으로 증착한 Fe-N 박막의 구조와 자기적 성질

이종화 ,  이원종

한국자기학회지

1993 .06

Dielectric properties of ZrTiO₄ thin films deposited by DC magnetron reactive sputtering

Taeseok Kim ,  Byungwoo Pa ,  k 외 1명

Journal of Korean Vacuum Science & Technology

1999 .10

Ti thin film deposited by grid - assisted magnetron sputtering

Min J. Jung ,  Kyung H. Nam ,  Jeon G. Han 외 1명

한국진공학회 학술발표회초록집

2002 .06

DC Reactive Magnetron Co-Sputtering 방법을 이용한 Cu-TiN Composite 박막 증착

장진혁 ,  김경훈 ,  김성민 외 1명

한국진공학회 학술발표회초록집

2013 .08

Dielectric Characteristics of Al₂O₃ Thin Films Deposited by Reactive Sputtering

Jae Hoon Choi ,  Joo Dong Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2000 .02

High rate deposition of poly - si thin films using new magnetron sputtering source

Jin-Hyo Boo ,  Heon Kyu Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2000 .02

The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

G.C. Kim ,  H.H Jeon ,  S.J. Hwangboe 외 4명

한국진공학회 학술발표회초록집

2007 .08

Morphological Structural and Electrical Properties of DC Magnetron Sputtered Mo Thin Films for Solar Cell Application

Rong Fan ,  Sung Hee Jung ,  Chee Won Chung

한국진공학회 학술발표회초록집

2012 .02

The optical property of GZO and ZnO thin films deposited by RF magnetron sputtering

S.J. Hwang ,  H.H. Jeon ,  G.C. Kim 외 4명

한국진공학회 학술발표회초록집

2007 .08

Effect of 12CaOㆍ7Al₂O₃thin film in reactive gasses by RF magnetron sputtering system

Phan Huu Tai ,  C. H. Jung ,  Y. K. Kang 외 1명

한국진공학회 학술발표회초록집

2007 .08