Deposition of Nano Crystalline Silicon Thin Film by Using a Neutral Beam Method at Low Temperature

임웅선 ,  강세구 ,  오종식 외 1명

한국진공학회 학술발표회초록집

2008 .02

ITO의 high Rs crystalline silicon solar cell으로의 적용에 대한 연구

유경열 ,  주민규 ,  김봉기 외 4명

한국진공학회 학술발표회초록집

2010 .08

Strain measurement in the interface between crystalline Silicon and amorphous Silicon with MEIS

Yongho Ha ,  Sehun Kim ,  H.K. Kim 외 1명

한국진공학회 학술발표회초록집

1999 .07

Effect of Hydrogen Neutral Beam Treatment on Nanocrystalline Silicon Thin-Film Transistors

이동혁 ,  장진녕 ,  홍문표

한국진공학회 학술발표회초록집

2014 .08

Neutral Beam assisted Chemical Vapor Deposition at Low Temperature for n-type Doped nano-crystalline silicon Thin Film

장진녕 ,  이동혁 ,  소현욱 외 3명

한국진공학회 학술발표회초록집

2011 .02

Electrode formation using Light induced electroless plating in the crystalline silicon solar cells

정명상 ,  강민구 ,  이정인 외 2명

한국진공학회 학술발표회초록집

2016 .02

Novel synthesis of nanocrystalline thin films by design and control of deposition energy and plasma

Jeon G. Han

한국진공학회 학술발표회초록집

2016 .02

Effects of Neutral Particle Beam on Nano-Crystalline Silicon Thin Film Deposited by Using Neutral Beam Assisted Chemical Vapor Deposition at Room Temperature

Dong Hyeok Lee ,  Jin Nyoung Jang ,  Hyun Wook So 외 3명

한국진공학회 학술발표회초록집

2012 .08

Initial Growth Stage of Y₂O₃

M.H. Cho ,  S.W. Whangbo ,  W.S. Koh 외 5명

한국진공학회 학술발표회초록집

1997 .07

The crystalline property of silicon thin films deposited by ICP-assisted CFUBM system

신경식 ,  최윤석 ,  최인식 외 1명

한국진공학회 학술발표회초록집

2009 .08

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Formation of Crystalline Copper Thin Films by a Sputtering-assisted Magnetic Field System at Room Temperature

Hyun Sung Kim

Applied Science and Convergence Technology

2018 .01

Low temperature solid phase crystallization of amorphous silicon thin film by crystalline activation

Hyung-Taek Kim ,  Young-Kwan Kim

Journal of Korean Vacuum Science & Technology

1998 .10

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Effective surface passivation of crystalline silicon by ALD Al₂O₃

장효식 ,  신웅철

한국진공학회 학술발표회초록집

2010 .02

Advances in Crystalline Silicon Solar Cell Technology

Hae-Seok Lee ,  Hyomin Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2015 .08

Effect of annealing temperature on Al2O3 layer for the passivation of crystalline silicon solar cell

Yoon Chung Nam ,  Kyung Dong Lee ,  JaeEun Kim 외 7명

한국진공학회 학술발표회초록집

2016 .02

Expanding Thermal Plasma CVD of Silicon Thin Films and Nano-Crystals : Fundamental Studies and Applications

Richa ,  d van de Sanden

한국진공학회 학술발표회초록집

2012 .08

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08