Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

Deposition and characterization of Ti - Al - N thin films deposited by plasma - assisted atomic layer deposition

Yong Ju Lee ,  Sang-Won Kang

한국진공학회 학술발표회초록집

2002 .06

Room Temperature Deposition of ZrO₂ thin film by using UV - enhanced Atomic Layer Deposition

강문철 ,  성명모

한국진공학회 학술발표회초록집

2005 .02

Epitaxial $SnO_2$ Thin Films on Sapphire($1\bar{1}02$) and ($11\bar{2}0$) Deposited by Atomic Layer Deposition

Kim ,  Dai-Hong ,  Hong 외 1명

한국결정학회 학술연구발표회

2007 .01

Low Temperature Encapsulation-Layer Fabrication of Organic-Inorganic Hybrid Thin Film by Atomic Layer Deposition-Molecular Layer Deposition

김세준 ,  김홍범 ,  성명모

한국진공학회 학술발표회초록집

2013 .02

Study of SrTiO₃ for Dielectric Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

임찬중 ,  임동혁 ,  마진원 외 5명

한국진공학회 학술발표회초록집

2009 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Synthesis and Characterization of SnO2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition Using SnCl4 Precursor and Oxygen Plasma

이동권 ,  김다영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08

Tunneling magnetoresistance of AlN / Co / AlN type discontinuous films

C. J. Yang ,  M. Zhang ,  Z. D. Zhang 외 1명

한국자기학회 학술연구발표회 논문개요집

2003 .12

Fabrication and Characterization of Organic-Inorganic Hybrid Thin Films

C.T.T.Huong ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .02

Growth of AlN Thin Film on Sapphire Substrates and ZnO Templates by RF-magnetron Sputtering

Hyunseok Na

Applied Science and Convergence Technology

2010 .01

Development of an Improved Numerical Methodology for Design and Modification of Large Area Plasma Processing Chamber

김호준 ,  이승무 ,  원제형

한국진공학회 학술발표회초록집

2014 .02

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition

Byung Kook Lee ,  Jae Ki Min ,  Sun Sook Lee 외 4명

한국진공학회 학술발표회초록집

2009 .08

Characteristics of ZnO thin film by atomic layer deposition for film bulk acoustic resonator

홍철광 ,  정수봉 ,  김수길 외 1명

한국진공학회 학술발표회초록집

2004 .02

Characterization of the Interface & ZrO₂ film fabricated by Atomic Layer Deposition method

박윤백 ,  연태원 ,  최민기 외 4명

한국진공학회 학술발표회초록집

2009 .08

Effects of Annealing of Al2O3 Layer on Passivation Properties by Plasma Assisted Atomic Layer Deposition

송세영 ,  장효식 ,  송희은

한국진공학회 학술발표회초록집

2013 .02

The effect of back electrode on electric properties of SnS thin film using atomic layer deposition

Hu weiguang ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2018 .02