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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한기계학회 Journal of Mechanical Science and Technology Journal of Mechanical Science and Technology Vol.19 No.11[Special Edition]
- 발행연도
- 2005.11
- 수록면
- 2,096 - 2,104 (9page)
이용수
초록· 키워드
오류제보하기
Materials are either removed from or added to a device, usually in a selective manner with using thin and/or thick film manufacturing processes that transfer the lithographic patterns into integrated circuits (ICs) or three-dimensional micromachines. This study deals with material removal by chemically assisted mechanical micromachining. Two methods are used chemical mechanical machining method are introduced in this paper. One, mechanically assisted chemical etching, is applied to fabricate a micro beam such as cantilever, and another is chemically assisted mechanical micromachining to fabricate microstructure such as micropattern, microchannel. The results are discussed.
목차
Abstract
1. Introduction
2. Experimental
3. Discussion
4. Conclusion
References
참고문헌 (3)
참고문헌 신청
Lee, J. M., Jin, W. H. and Kim, D. E., 2001, "Application of Single Asperity Abrasion Process for Surface Micromachining," Wear 251, pp.1133~1143.
Rentsch, R., Inasaki, I., Brinksmeier, E., Preu β , W. and Riemer, O., 1996, "Influence of Material Characteristics on the Micromachining Process," Materials Issues in Machining-III and The Physics of Machining Process-III, TMS, D. A. Stephenson and R. St
Shimada, S., Inamura, T. and Ikawa, N., 1996, "Possible Mechanism of Brittle-Ductile Transition in Material Removal in Micromachining of Brittle Materials," Technical Publication, Department of Precision and Technology, Osaka University, Osaka, Japan.
Rentsch, R., Inasaki, I., Brinksmeier, E., Preu β , W. and Riemer, O., 1996, "Influence of Material Characteristics on the Micromachining Process," Materials Issues in Machining-III and The Physics of Machining Process-III, TMS, D. A. Stephenson and R. St
Shimada, S., Inamura, T. and Ikawa, N., 1996, "Possible Mechanism of Brittle-Ductile Transition in Material Removal in Micromachining of Brittle Materials," Technical Publication, Department of Precision and Technology, Osaka University, Osaka, Japan.
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