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This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet is a zero mass flux device that converts electrical energy into the momentum. The synthetic jet actuation is usually generated by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the synthetic jet micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. Form the results of numerical analysis, the micro air pump has been fabricated by the PDMS replication process. The most important design factors of the micro air pump in micro fuel cells are the small size and low power consumption. To satisfy the design targets, we used SP4423 micro chip that is high voltage output DC-AC converter to control the PZT. The SP4423 micro chips can operate from 2.2~6V power supply (or battery) and is capable of supplying up to 200V signals. So it is possible to make small size controller and low power consumption under 0.1W. The micro air pump’s size was 16mm × 14mm × 3 mm and was conducted performance test. With a voltage of 3V at 100Hz, the air pump’s pumping pressure is 600pa and its power consumption is only 0.1W.

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Abstract
1. 서론
2. 에어펌프의 설계
3. 마이크로 에어펌프 제작 및 실험
4. 결론
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UCI(KEPA) : I410-ECN-0101-2009-552-014791179