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Nonlinearity Error Compensation in Heterodyne Laser interferometer using WLS Method
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WLS를 이용한 헤테로다인 레이저 간섭계에서의 비선형 오차 보정

논문 기본 정보

Type
Proceeding
Author
Journal
The Korean Institute of Electrical Engineers 대한전기학회 학술대회 논문집 2007 CICS 정보 및 제어 학술대회 논문집
Published
2007.10
Pages
271 - 272 (2page)

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Nonlinearity Error Compensation in Heterodyne Laser interferometer using WLS Method
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Research history (2)

2007

Nonlinearity Error Compensation in Heterodyne Laser interferometer using WLS Method
Hyungseok Cha ,  Woo ,  am Lee 대한전기학회 학술대회 논문집 2007.10 Proceeding
Nonlinearity Error Compensation in Heterodyne Laser interferometer using WLS Method
Hyungseok Cha ,  Woo ,  am Lee 대한전기학회 학술대회 논문집 2007.10 Proceeding
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In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, ca ... View All

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