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Micro Acoustic Sensors based on MEMS Technology
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MEMS 기술을 이용한 마이크로 음향센서

논문 기본 정보

Type
Proceeding
Author
Yongrae Roh (경북대학교)
Journal
The Korean Society of Mechanical Engineers 대한기계학회 춘추학술대회 대한기계학회 2002년도 동역학 및 제어부문 동계 워크숍 강연집
Published
2002.2
Pages
56 - 59 (4page)

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Micro Acoustic Sensors based on MEMS Technology
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Research history (2)

2002

Micro Acoustic Sensors based on MEMS Technology
Yong ,  ae Roh 대한기계학회 춘추학술대회 2002.02 Proceeding

2001

MEMS 기술을 이용한 마이크로 음향센서
노용래 Journal of KSNVE 2001.12 Academic journal
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Abstract· Keywords

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기존 음향센서의 한계를 극복할 수 있는 새로운 형태로서 MEMS 기술을 이용한 마이크로 음향센서인 cMUT의 개념과 그 작동원리를 알아본다. 기존 음향센서 특히 초음파 음향센서로 널리 사용되는 압전형 센서와 비교한 장단점을 알아보고 그에 따라 cMUT의 장점을 살릴 수 있는 응용 분야와 향후 연구 방향을 고찰해본다.
#Acoustic sensor #MEMS #micro-machined #cMUf Abstract

Contents

Abstract
1. 서론
2. cMUT의 구조 및 작동 원리
3. cMUT의 특성
4. 맺음말
후기
참고문헌

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