Effect of Plasma Pretreatment on Superconformal Cu Alloy Gap-Filling of Nano-scale Trenches

문학기 ,  이정훈 ,  이수진 외 3명

한국진공학회 학술발표회초록집

2011 .02

Role of a passivation layer in superconformal copper gap-fill by chemical vapor deposition

문학기 ,  김선일 ,  박영록 외 1명

한국진공학회 학술발표회초록집

2009 .08

The effect of nucleation layer growth rate on structural and electrical properties of GaN grown by metalorganic chemical vapor deposition(MOCVD)

김동준 ,  문용태 ,  안광순 외 2명

한국진공학회 학술발표회초록집

1998 .07

The effect of plamsa treatment on superconformal copper gap-fill

문학기 ,  김선일 ,  박영록 외 1명

한국진공학회 학술발표회초록집

2010 .02

Epitaxial growth of InN on GaN by metalorganic chemical vapor deposition

서희찬 ,  김현진 ,  나현석 외 7명

한국진공학회 학술발표회초록집

2003 .08

ZnO nanostructure grown by metalorganic chemical vapor deposition : Nanoparticles and nanorods

S.-H. Jeong ,  D.-G. Yoo ,  S.-B. Lee 외 1명

한국진공학회 학술발표회초록집

2006 .08

TiO₂ based diluted magnetic semiconductor thin films grown by liquid - delivery metalorganic chemical vapor deposition

Nak-Jin Seong ,  Young-Nam Oh ,  Soon-Gil Yoon

한국자기학회 학술연구발표회 논문개요집

2003 .12

Optical characteristics of p-type ZnO epilayers doped with Sb by metalorganic chemical vapor deposition

B. J. Kwon ,  Y. H. Cho ,  Y. S. Choi 외 2명

한국진공학회 학술발표회초록집

2010 .02

X - ray photoelectron spectroscopy studies of ferroelectric PZT thin films prepared by metalorganic chemical vapor deposition method

Jeong Woo Choo ,  Young Kwan Kim ,  Byoung Chung Sohn 외 4명

한국진공학회 학술발표회초록집

1995 .02

Filling of Cu-Al Alloy Into Nanoscale Trench with High Aspect Ratio by Cyclic Metal Organic Chemical Vapor Deposition

H.K. Moon ,  S.J. Lee ,  J.H. Lee 외 3명

한국진공학회 학술발표회초록집

2012 .02

Growth of InGaP on Ge substrates by metalorganic chemical vapor deposition for triple junction solar cells

이상수 ,  양창재 ,  신건욱 외 1명

한국진공학회 학술발표회초록집

2010 .02

Extended Abstract : Interfacial Layer Formation Mechanisms of PbTiO₃ Thin Films Grown on p - Si Substrates by Metalorganic Chemical Vapor Deposition

박태혁 ,  정민 ,  김효진 외 4명

한국진공학회 학술발표회초록집

1994 .02

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

In situ Monitoring of As / P Exchange Reaction & Arsenic Carryover in Metalorganic Chemical Vapor Deposition by Surface Photo - absorption

황희돈 ,  이태완 ,  문영부 외 2명

한국진공학회 학술발표회초록집

1998 .07

Metalorganic Chemical Vapor Deposition of Ga₂O₃ Thin Films Using Dimethylgallium Isopropoxide and O₂

우정준 ,  박영수 ,  이희주 외 3명

한국진공학회 학술발표회초록집

2010 .02

Cu growth on hydrogen plasma treated Cu by metal organic chemical vapor deposition

Hock Key Moon ,  Nae-Eung Lee

한국진공학회 학술발표회초록집

2009 .02

The Study on Synthesis and Characterization of Various Functional Materials by Physical Vapor Deposition and Chemical Vapor Deposition method

송용화 ,  조상진 ,  정충경 외 1명

한국진공학회 학술발표회초록집

2006 .02

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Plasma anisotropic deposition of copper in trenches of nm scale

Kazuno ,  i Koga ,  Masaha 외 2명

한국진공학회 학술발표회초록집

2007 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08