지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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Transparent conducting oxide films like ITO/Au/ITO and AZO/Au/AZO were fabricated with a sputter at a low-temperature of less then 70℃ and their crystallization and opto-electrical properties were studied. X-ray diffractiometry showed that single-ITO layer was amorphous, whereas, ITO of ITO/Au/ITO multi-layer was crystal. The ITO crystallization and its orientation depended on Au crystallization. Surface roughness of the ITO-multi-layers were in the range of 29-88% of that of ITO-single layer. ITO on amorphous gold layer had more rough surface than ITO on crystal gold. The gold layer between ITO improved electrical conductivity. Carrier density, mobility, resistivity and sheet resistance of ITO-single layer were 2.3×10¹?/㎤, 85×㎠/Vs, 31×10?⁴Ω㎝, and 310×Ω/㎠, respectively. Those of ITO/Au/ITO-multi-layers depended on Au-interlayer-thickness, which were in the range of 3.6×10<SUP>19~</SUP>4.2×10₂₁/㎤, 43~85㎠/Vs, 0.17×10?⁴~25×10?⁴Ω㎝, and 1.7~20×Ω/㎠, respectively. The sheet resistances of the single-layer ITO and the multi-layer ITO were 310 and 2.7~21Ω/㎠, respectively. That of AZO/Au/AZO was 8.6Ω/㎠, which was better than the single-layer ITO.
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Abstract
1. 서론
2. 실험방법
3. 결과 및 고찰
4. 결론
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UCI(KEPA) : I410-ECN-0101-2012-560-004009949