지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
This paper focuses on the problem of scheduling wafer lots with limited waiting times between pairs of consecutive operations in a semiconductor wafer fabrication facility. For the problem of minimizing total tardiness of orders, we develop a priority rule?based scheduling method in which a scheduling decision for an operation is made based on the states of workstations for the operation and its successor or predecessor operation. To evaluate performance of the suggested scheduling method, we perform simulation experiments using real factory data as well as randomly generated data sets. Results of the simulation experiments show that the suggested method performs better than a method suggested in other research and the one that has been used in practice.
목차
1. Introduction
2. Scheduling Policies
3. Scheduling Algorithms for the Interdependent Scheduling Policy
4. Simulation experiments
5. Concluding remarks
References
참고문헌 (43)
참고문헌 신청
1. [학술지(정기간행물)] - Anderson, E. J. / 1990 / Two New Rules to Minimize Tardiness in a Job Shop / International Journal of Production Research 28 (12) : 2277 ~ 2292
2. [학술대회논문] - Artigues, C. / 2006 / A Batch Optimization Solver for Diffusion Area Scheduling in Semiconductor Manufacturing, Proc / 2006 IFAC International Symposium on Information Control Problems in Manufacturing : 727 ~ 732
3. [학술지(정기간행물)] - Caumond, A. / 2008 / A Memetic Algorithm for the Job-shop with Time-lags / Computers and Operational Research 35 (7) : 2331 ~ 2356
4. [학술지(정기간행물)] - Chen, J. S. / 2006 / Model Formulations for the Machine Scheduling Problem with Limited Waiting Time Constraints / Jornal of Information and Optimization Sciences 27 (1) : 225 ~ 240
5. [학술지(정기간행물)] - Chern C. C. / 2004 / A Heuristic Input Control Method for a Single-product, High-volume Wafer Fabrication Process to Minimize the Number of Photomask Changes / Journal of Manufacturing Systems 23 (1) : 30 ~ 45
2. [학술대회논문] - Artigues, C. / 2006 / A Batch Optimization Solver for Diffusion Area Scheduling in Semiconductor Manufacturing, Proc / 2006 IFAC International Symposium on Information Control Problems in Manufacturing : 727 ~ 732
3. [학술지(정기간행물)] - Caumond, A. / 2008 / A Memetic Algorithm for the Job-shop with Time-lags / Computers and Operational Research 35 (7) : 2331 ~ 2356
4. [학술지(정기간행물)] - Chen, J. S. / 2006 / Model Formulations for the Machine Scheduling Problem with Limited Waiting Time Constraints / Jornal of Information and Optimization Sciences 27 (1) : 225 ~ 240
5. [학술지(정기간행물)] - Chern C. C. / 2004 / A Heuristic Input Control Method for a Single-product, High-volume Wafer Fabrication Process to Minimize the Number of Photomask Changes / Journal of Manufacturing Systems 23 (1) : 30 ~ 45
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UCI(KEPA) : I410-ECN-0101-2013-530-003637541