지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2012.10
- 수록면
- 1,061 - 1,064 (4page)
이용수
초록· 키워드
오류제보하기
High precision positioning is a key technology in various advanced applications. Performances such as longer motion range, nanometer level precision and multiple degree-of freedom(d.o.f) motion within compact size are strongly required recently. In this paper, we proposed and realized new 4 d.o.f ultra-precision stage employing 5 VCMs and 2 flexure guide mechanisms. The non-contact characteristic of the VCM and the flexure is utilized to achieve ultra precision and long motion range simultaneously. The VCMs and the flexure guides were mathematically modeled and optimized to achieve the best performance. The stage was manufactured within compact size of 180 X 180 X 30.7 mm<SUB>3</SUB> and feedback controlled. The experimental results showed the motion range more than 1.80 mm in plane and 0.3 mm vertically and the resolution of 10 nm in plane and 14 nm vertically.
목차
Abstract
1. INTRODUCTION
2. SYSTEM STURUCTURE
3. MODELING AND OPTIMIZATION
4. EXPERIMENT
5. CONCLUSION
REFERENCES
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