Comparative simulation of microwave probes for plasma density measurement and its application

김대웅 ,  유신재 ,  김시준 외 7명

한국진공학회 학술발표회초록집

2016 .02

Development of a microwave plasma source based on a resonance cavity

S. PARK ,  S. YOUN ,  J.W. YOON 외 6명

한국진공학회 학술발표회초록집

2016 .08

Microwave Plasma Source Optimization for Thin Film Deposition Applications

Mahmoud A. I. Elga ,  hy

Applied Science and Convergence Technology

2022 .03

Plasma surface treatment using dual microwave-excited atmospheric-pressure plasma jets

임대천 ,  최준

한국진공학회 학술발표회초록집

2020 .08

Characterization of linear microwave plasma based on N2/SiH4/NH3 gases using fluid simulation

서권상 ,  한문기 ,  김동현 외 2명

한국진공학회 학술발표회초록집

2015 .08

Preparation and Electromagnetic Properties of an Electromagnetic Wave Absorber

Sun Chang ,  Sun Kangning ,  Pang Laixue 외 1명

Journal of Magnetics

2016 .03

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02

Characterization of inductively coupled Ar/CH4 plasma using tuned single langmuir probe and fluid simulation

차주홍 ,  한문기 ,  김동현 외 2명

한국진공학회 학술발표회초록집

2015 .08

Applications of fluid based plasma simulation : dry etch

주정훈

한국진공학회 학술발표회초록집

2018 .02

Microwave excited plasma sources using microstrip line

Jaeho KIM ,  Hajime SAKAKITA ,  Hi 외 1명

한국진공학회 학술발표회초록집

2016 .08

Properties of Inductively coupled Ar/CH4 plasma based on plasma diagnostics with fluid simulation

차주홍 ,  손의정 ,  윤용수 외 3명

한국진공학회 학술발표회초록집

2016 .02

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

Flow ability improvement of fine ceramic powder using microwave plasma torch at atmospheric pressure.

천세민 ,  박새미 ,  양건우 외 2명

한국진공학회 학술발표회초록집

2019 .08

마이크로스트립 라인을 이용한 마이크로웨이브 플라즈마 기술 및 응용

김재호

진공이야기

2020 .09

Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH₄ Microwave Plasma

Moon-Ki Han ,  Taehwan Kim ,  Ju-Hong Cha 외 3명

Applied Science and Convergence Technology

2017 .03

Effect of hybrid plasma source on O radical generation in oxygen plasma

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Young-Hun Hong 외 2명

한국진공학회 학술발표회초록집

2018 .08

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03

Plasma Properties Data Center Activities for Plasma Application in the National Fusion Research Institute

송미영 ,  김대철 ,  권득철 외 16명

한국진공학회 학술발표회초록집

2019 .08

The Investigation of Microwave irradiation on Solution-deposited Aluminum-Oxide

조광원 ,  조원주 ,  임철민

한국진공학회 학술발표회초록집

2015 .02