지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.19 No.2
- 발행연도
- 2019.4
- 수록면
- 172 - 177 (6page)
- DOI
- 10.5573/JSTS.2019.19.2.172
이용수
초록· 키워드
오류제보하기
In this work, we propose a novel barometric pressure sensor based on the piezoresistive effect of polycrystalline silicon (Poly-Si). Key process steps for the fabrication of the barometric pressure sensor are explained. A sealed cavity is formed under the insulator diaphragm, and piezoresistors composed of 0.35 ㎛ thick Poly-Si is formed on the diaphragm. The distance between the diaphragm and the silicon substrate in the cavity is 2 ㎛. The Poly-Si is doped by implanting boron ions at a heavy dose and the effect of the dose is investigated. In this sensor, the stress and strain of diaphragm induced by an external atmospheric pressure are read by the piezoresistance change of the Poly-Si. The displacement of the diaphragm showed 0.17 ㎚ change at 1 h㎩. The changes in the strain applied to the Poly-Si on the diaphragm lead to a change in piezoresistance. The change in piezoresistance is amplified using a Whetstone bridge circuit fabricated on the same chip. The barometric pressure sensor has a sensitivity of 2.5 ㎶/h㎩ at a boron dose of 5×1015 ㎝<SUP>-2</SUP>
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. FABRICATION
Ⅲ. EXPERIMENTAL RESULTS AND DISCUSSIONS
Ⅴ. CONCLUSIONS
REFERENCES
참고문헌 (14)
참고문헌 신청
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Tsung-Lin Chou, Chen-Hung Chu, Chun-Te Lin and Kuo-Ning Chiang, Sensitivity analysis of packaging effect of silicon-based piezoresistive pressure sensor, Sensors and Actuators A, Vol. 152, pp. 29-38, 2009
M. Olfatnia, T. Xu, J.M. Miao, L.S. Ong, X.M. Jing and L. Norford, Piezoelectric circular microdiaphragm based pressure sensors, Sensors and Actuators A, Vol. 163, pp. 32-36, 2010
Yozo Kanda and Akio Yasukawa, Optimum design considerations for silicon piezoresistive pressure sensors, Sensors and Actuators A, Vol. 62, pp. 539-542,1997
Dieter Maier-Schneider, J. Maibach and Emst Obermeier, A new analytical solution for the loaddeflection of square membranes, Journal of Microelectromechanical System, Vol. 4, pp. 238- 241, 1995
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